Thomas Clyde Saunders

US Patent:

39769232, Aug 24, 1976

Filed:

Apr 16, 1975

Appl. No.:

5/568522

Inventors:

Victor Andrew Firtion - Secaucus NJ
Leif Rongved - Summit NJ
Thomas Edward Saunders - Basking Ridge NJ

Assignee:

Bell Telephone Laboratories, Incorporated - Murray Hill NJ

International Classification:

H02K 3314

US Classification:

318128

Abstract:

Integrated circuit mask patterns are laser machined by mounting substrates on a support that is periodically stepped in a y direction after each scan by a laser writing beam in an x direction. X-direction scanning is accomplished by mounting a mirror on a carriage that reciprocates by rebounding between two displaced coil springs. A coding laser beam is reflected from the carriage through a stationary code plate, comprising alternate transparent and opaque stripes, to monitor the position of the carriage and to control the modulation of the writing beam.

US Patent:

RE310530, Oct 12, 1982

Filed:

May 1, 1981

Appl. No.:

6/259596

Inventors:

Victor A. Firtion - Secaucus NJ
Donald R. Herriott - Morris Township, Morris County NJ
Martin E. Poulsen - New Providence NJ
Leif Rongved - Convent Station NJ
Thomas E. Saunders - Basking Ridge NJ

Assignee:

Bell Telephone Laboratories, Incorporated - Murray Hill NJ

International Classification:

G03B 2900
B25B 1100
B23Q 700

US Classification:

355 77

Abstract:

An apparatus and method for holding a thin workpiece such as a semiconductor wafer for operations which require the workpiece to have a high degree of planarity such as photolithographic printing includes positioning the workpiece onto a planar holding face comprising the points of a multiplicity of regularly spaced-apart substantially parallel pins with a thin rim encompassing all pins to contain a vacuum in the region adjacent to the workpiece. The small abutting area of each pinpoint abutment reduces the probability of dirt particles collecting on the holding face and provides a high thrust pressure to dislodge dirt particles interposed between the abutment and the workpiece. A small amount of lateral motion is imparted to the workpiece when it first contacts the holding face to brush off any dirt particles on the abutments.

US Patent:

42136989, Jul 22, 1980

Filed:

Dec 1, 1978

Appl. No.:

5/965304

Inventors:

Victor A. Firtion - Secaucus NJ
Donald R. Herriott - Morris Township, Morris County NJ
Martin E. Poulsen - New Providence NJ
Leif Rongved - Summit NJ
Thomas E. Saunders - Basking Ridge NJ

Assignee:

Bell Telephone Laboratories, Incorporated - Murray Hill NJ

International Classification:

G03B 2900

US Classification:

355 77

Abstract:

An apparatus and method for holding a thin workpiece such as a semiconductor wafer for operations which require the workpiece to have a high degree of planarity such as photolithographic printing includes positioning the workpiece onto a planar holding face comprising the points of a multiplicity of regularly spaced-apart substantially parallel pins with a thin rim encompassing all pins to contain a vacuum in the region adjacent to the workpiece. The small abutting area of each pinpoint abutment reduces the probability of dirt particles collecting on the holding face and provides a high thrust pressure to dislodge dirt particles interposed between the abutment and the workpiece. A small amount of lateral motion is imparted to the workpiece when it first contacts the holding face to brush off any dirt particles on the abutments.