Timothy E Archer

US Patent:

7482247, Jan 27, 2009

Filed:

Sep 19, 2006

Appl. No.:

11/524502

Inventors:

George D. Papasouliotis - North Andover MA, US
Raihan M. Tarafdar - San Jose CA, US
Dennis M. Hausmann - Lake Oswego OR, US
Jeff Tobin - Mountain View CA, US
Adrianne K. Tipton - Pleasanton CA, US
Bunsen Nie - Fremont CA, US
Brian G. Lu - Fremont CA, US
Timothy M. Archer - Lake Oswego OR, US
Sasson Roger Somekh - Los Altos Hills CA, US

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

H01L 21/311

US Classification:

438437, 438789, 257E21245, 257E21546

Abstract:

Conformal nanolaminate dielectric deposition and etch back processes that can fill high aspect ratio (typically at least 5:1, for example 6:1), narrow width (typically sub 0. 13 micron, for example 0. 1 micron or less) gaps with significantly reduced incidence of voids or weak spots involve the use of any suitable confirmal dielectric deposition technique and a dry etch back. The etch back part of the process involves a single step or an integrated multi-step (for example, two-step) procedure including an anisotropic dry etch followed by an isotropic dry etch. The all dry deposition and etch back process in a single tool increases throughput and reduces handling of wafers resulting in more efficient and higher quality nanolaminate dielectric gap fill operations.

US Patent:

20200173480, Jun 4, 2020

Filed:

Dec 2, 2019

Appl. No.:

16/701075

Inventors:

- Chester NH, US
Timothy Edward Archer - Chester NH, US

International Classification:

F16B 13/06

Abstract:

An adjustable fastener system generally includes an anchor component, a drive component, and a finish head component. The finish head component is threaded onto the anchor component to form the completed fastener that may be adjusted to different heights. The drive component is used to drive the anchor component into position prior to adjusting the finish head component. In some embodiments, the drive component may be used before the finish head component is installed, and in other embodiments, the drive component may be used with the finish head component installed. The adjustable fastener system saves time and effort at a construction site, eliminates the amount of prep work, and eliminates the need to have multiple different fasteners on site. The adjustable fastener system may be used for installing insulation panels over concrete in a roofing system as well as other applications.