A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.
Incorporation Of Additives Into Protective Coatings
- Draper UT, US Sean Owen Clancy - Draper UT, US Yang Yun - Draper UT, US Tining Su - Draper UT, US Liulei Cao - Salt Lake City UT, US
International Classification:
B05D 1/00 C09D 7/12 C09D 147/00
Abstract:
Protective coatings with one or more additives dispersed therethrough are disclosed. A protective coating may comprise a poly(p-xylylene), or parylene. An additive may be configured to cause the protective coating to contrast (e.g., visibly, etc.) with features or components that are exposed beyond a periphery of the protective coating. Additives that provide other characteristics are also disclosed. In addition, methods for applying protective coatings according to this disclosure are disclosed, as are inspection methods.
Impermeable Protective Coatings Through Which Electrical Connections May Be Established And Electronic Devices Including The Impermeable Protective Coatings
- Draper UT, US Tining Su - Draper UT, US Yang Yun - Draper UT, US
International Classification:
H05K 5/06 H05K 1/18 H05K 5/00 H05K 3/00
Abstract:
Protective coatings are disclosed that are configured to cover electronic components within an electronic device, while enabling electrical connections to be established with electrical contacts that are covered by the protective coatings. Such a protective coating may comprise a parylene, or a poly(p-xylylene), protective coating that has a thickness of at least 0.1 μm and at most about 2 μm. Electronic devices that include such a protective coating are also disclosed.
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