Tobin J Geatz

US Patent:

51489457, Sep 22, 1992

Filed:

Sep 17, 1990

Appl. No.:

7/583826

Inventors:

Tobin Geatz - Durham NC

Assignee:

Applied Chemical Solutions - Hollister CA

International Classification:

B67D 508

US Classification:

222 1

Abstract:

The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing multiple alternating pressure vessels, chemicals are drawn from virtually any bulk source and delivered to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure.