Todd R Sharpe

US Patent:

6689222, Feb 10, 2004

Filed:

Jul 1, 2002

Appl. No.:

10/188337

Inventors:

Don Titel - Liberty Hill TX
Wayne W. Wheatley - Austin TX
Todd W. Sharpe - Dale TX

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118733, 118715, 1563451

Abstract:

The present invention provides such an improved metallic surface for sealable mating to a seal device such as a gasket. In one embodiment, it provides a sealable apparatus that has a component and a seal device. The component has a seal contact area for receiving the seal device. The seal contact area comprises a metallic surface with randomly distributed micro-pits that are capable of sealably mating with the seal device when the seal contact area is operably mated to the seal device.