Tom H Trinh

US Patent:

20200064818, Feb 27, 2020

Filed:

Aug 23, 2018

Appl. No.:

16/110348

Inventors:

- Fremont CA, US
Willie Ku - Fremont CA, US
Tom TRINH - Dublin CA, US
Henry CHAN - San Jose CA, US

International Classification:

G05B 19/418
H04L 12/24
G06F 3/0484
G06F 3/14
G01R 13/02

Abstract:

A network interface controller for a communication network of a substrate processing system includes a data collection module configured to monitor a communication bus to retrieve and store data frames transmitted between components of the substrate processing system. A user interface is configured to receive inputs for configuring extraction of data from the data frames. A data processing module is configured to store, based on a network configuration file, a map correlating data within the data frames to of the components of the substrate processing system, extract data from the data frames in accordance with the inputs received by the user interface and the map, and provide, to the user interface, the data as extracted from the data frames. The user interface is further configured to display the data as extracted from the data frames in accordance with the inputs received by the user interface.