Troy W Hoehner

US Patent:

6718227, Apr 6, 2004

Filed:

Oct 12, 2000

Appl. No.:

09/689089

Inventors:

Floyd F. Schemmel - Sherman TX
George W. Reeves - Sherman TX
Troy W. Hoehner - McKinney TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G06F 700

US Classification:

700213, 700189, 700190, 700218, 700229

Abstract:

A system for determining a position error in a wafer handling device includes a control module, an image acquisition module, and an image analysis module. The control module moves a workpiece having one or more reference marks, and the image acquisition module captures an image of at least one reference mark. The image analysis module, which is coupled to the image acquisition module, compares the captured image to stored target information to determine a position error.