Veljko Milanovic

US Patent:

7295726, Nov 13, 2007

Filed:

Dec 2, 2004

Appl. No.:

11/003271

Inventors:

Veljko Milanovic - Berkeley CA, US
Gabriel A. Matus - Santa Clara CA, US

Assignee:

Adriatic Research Institute - Berkeley CA

International Classification:

G02B 6/26
G02B 6/35

US Classification:

385 18, 385 16, 385 17, 385 14

Abstract:

Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels, The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

US Patent:

7428353, Sep 23, 2008

Filed:

Aug 21, 2006

Appl. No.:

11/465835

Inventors:

Veljko Milanovic - El Cerrito CA, US
Kenneth Castelino - Brooklyn NY, US

Assignee:

Adriatic Research Institute - Berkeley CA

International Classification:

G02B 6/26
G02B 6/35

US Classification:

385 18, 385 14, 385 16, 385 17

Abstract:

A MEMS system is disclosed. The system includes a MEMS device having including a gimbal-less device mount supported by two or more bi-axial linkages. Each bi-axial linkage is mechanically coupled between the device mount and an actuator. Each bi-axial linkage is distinct from the actuator. Each bi-axial linkage includes a first flexure beam configured to flex about a first axis and a second flexure beam attached to the first flexure beam. The second flexure beam is configured to flex about a second axis. The two or more bi-axial linkages provide the device mount with two or more degrees of freedom of movement. The bi axial linkages and device mount are formed from the same device layer. The MEMS device has a mechanical response that is approximately proportional to a square of a drive voltage. A signal converter is adapted to convert a signal representing a desired position of the MEMS device to a voltage and a filter is coupled to the signal converter. The filter has a substantially flat group delay response.

US Patent:

8570502, Oct 29, 2013

Filed:

Feb 20, 2012

Appl. No.:

13/400504

Inventors:

Stefan Richter - Jena, DE
Veljko Milanovic - Richmond CA, US
Günter Rudolph - Jena, DE
Michel Stutz - Jena, DE
Gerhard Krampert - Jena, DE

Assignee:

Carl Zeiss AG - Oberkochen

International Classification:

G01B 11/26

US Classification:

356138, 356139

Abstract:

There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

US Patent:

8043513, Oct 25, 2011

Filed:

Nov 9, 2007

Appl. No.:

11/938197

Inventors:

Veljko Milanovic - Berkeley CA, US
Gabriel A. Matus - Santa Clara CA, US

Assignee:

Adriatic Research Institute - Berkeley CA

International Classification:

C23F 1/00

US Classification:

216 2, 216 41, 216 48, 385 14, 385 16, 385 17, 385 18

Abstract:

Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

US Patent:

20120168605, Jul 5, 2012

Filed:

Jan 20, 2012

Appl. No.:

13/354541

Inventors:

Veljko Milanovic - Richmond CA, US

Assignee:

Mirrorcle Technologies, Inc. - Richmond CA

International Classification:

G01C 21/20
G01C 21/00

US Classification:

2502031, 250235, 2502061

Abstract:

An optical tracking system can include at least one scanning detector having a scanning mirror and one or more fixed photo-detectors located near the scanning mirror. The scanning mirror can be configured to deflect a light beam from a source towards a retroreflective target and the photodetectors are configured to collect a portion of the light beam that is retroreflected from the target. A scanning optical detector apparatus may optionally comprise a substrate, a scanning mirror having at least one portion monolithically integrated into the substrate, and one or more photodetectors monolithically incorporated into the substrate. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the claims' scope or meaning.

US Patent:

61718807, Jan 9, 2001

Filed:

Jun 14, 1999

Appl. No.:

9/332112

Inventors:

Michael Gaitan - North Potomac MD
Nim Tea - Skokie IL
Edwin D. Bowen - Ramona CA
Veljko Milanovic - Berkeley CA

Assignee:

The United States of America as represented by the Secretary of Commerce - Washington DC

International Classification:

H01L 2100

US Classification:

438 52

Abstract:

A method is provided for the manufacture of a convective accelerometer and tilt sensor device using CMOS techniques. An integrated circuit chip is produced which includes a silicon substrate having an integrated circuit pattern thereon including a heater element located centrally of the substrate and at least first and second thermocouple elements located on the substrate on opposite sides of the heater element. Thereafter, portions of the substrate surrounding and beneath the heater and thermocouple elements are etched away to suspend the element on the substrate and thus to thermally isolate the elements from the substrate. The substrate is etched up to the cold thermocouple junction of the thermocouple elements so the cold junction remains on the substrate.

US Patent:

61072109, Aug 22, 2000

Filed:

Aug 19, 1998

Appl. No.:

9/136524

Inventors:

Michael Gaitan - North Potomac MD
Edwin D. Bowen - Ramona CA
Veljko Milanovic - Washington DC

Assignee:

The United States of America as represented by the Secretary of Commerce - Washington DC

International Classification:

H01L 21302
H01L 218238

US Classification:

438734

Abstract:

A method for forming a single cavity in a substrate, which may extend approximately the length of a device located on top of the substrate, and device produced thereby. The device has a length and a width, and may extend approximately the length of the substrate. After locating the device on the surface of the substrate, a first etchant is applied through openings on the surface of the substrate. Subsequently, a second etchant is applied through the same openings on the surface of the substrate. As a result, a single cavity is formed beneath the surface of the device, suspending the device and minimizing electrical coupling.

US Patent:

20230002215, Jan 5, 2023

Filed:

Sep 8, 2022

Appl. No.:

17/940770

Inventors:

- Richmond CA, US
Johannes Kindt - Weimar, DE
Veljko Milanovic - Richmond CA, US

International Classification:

B81B 3/00
H02N 1/00

Abstract:

MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.