Veronica J Mccarthy

US Patent:

20070252299, Nov 1, 2007

Filed:

Apr 27, 2006

Appl. No.:

11/413658

Inventors:

Maitreyee Mahajani - Saratoga CA, US
Joseph Yudovsky - Campbell CA, US
Yi-Chiau Huang - Fremont CA, US
Kaushal Singh - Santa Clara CA, US
Veronica McCarthy - San Jose CA, US

International Classification:

C23C 16/01

US Classification:

264081000

Abstract:

A method for synchronizing the rotation of a substrate boat with material deposition is disclosed. Whenever support rods of the substrate boat rotate past a deposition source, they will block deposition gas from reaching certain portions of the substrate. By stopping the deposition gas whenever the support rods are located between the substrate and the deposition source, a uniform deposition can be achieved.

US Patent:

53696751, Nov 29, 1994

Filed:

Jun 25, 1993

Appl. No.:

8/083141

Inventors:

Thomas P. Diaz - San Martin CA
Gary W. Contreras - San Jose CA
Gerald M. Gordon - Soquel CA
Veronica L. McCarthy - Fremont CA
Daniel Weinstein - San Jose CA

Assignee:

General Electric Company - San Jose CA

International Classification:

G21C 1700

US Classification:

376249

Abstract:

Electrically controlled load activating mechanisms that can be used inside the containment vessel of a nuclear reactor in conjunction with bellows-loaded DCB crack growth sensors installed inside the reactor pressure vessel or piping of a nuclear reactor. One mechanism is a liquid-filled, double-bellows master/slave arrangement connected by a capillary tube to transmit the loading provided by a linear motion device. Another mechanism uses a heat-resistant gas bottle that can be heated in a furnace to increase the gas pressure to expand the bellows of the DCB sensor. A third mechanism uses a pump or compressor to provide the necessary expansion force. The loading is controlled via electrical connections that do not require special pressure boundary penetrations of the containment vessel.