Wayne B Marsh

US Patent:

46634142, May 5, 1987

Filed:

May 14, 1985

Appl. No.:

6/733690

Inventors:

William E. Estes - Ossining NY
Wayne E. Marsh - Tarrytown NY

Assignee:

Stauffer Chemical Company - Westport CT

International Classification:

C08G 7722

US Classification:

528 30

Abstract:

There are disclosed certain categories of novel spin-coating compositions comprising phosphorus-doped and/or boron-doped silsesquioxane oligomers. Cured interlayer dielectric films prepared therefrom have a superior combination of defined properties, particularly including adhesion (of single-coat and multiple coats) and/or resistance against degradation at temperatures above 500. degree. C. The spin-coating compositions are prepared in a critical manner from critical raw materials.