William Howard Webster

US Patent:

6893574, May 17, 2005

Filed:

Oct 23, 2001

Appl. No.:

10/002953

Inventors:

Lawrence E. Felton - Hopkinton MA, US
Peter W. Farrell - Lunenburg MA, US
Jing Luo - Lexington MA, US
David J. Collins - Windham NH, US
John R. Martin - Foxborough MA, US
William A. Webster - Tewksbury MA, US

International Classification:

C23F001/00
H01L021/44
H01L021/48
H01L021/50

US Classification:

216 2, 438113

Abstract:

A MEMS capping method and apparatus uses a cap structure on which is formed a MEMS cavity, a cut capture cavity, and a cap wall. The cap wall is essentially the outer wall of the MEMS cavity and the inner wall of the cut capture cavity. The cap structure is bonded onto a MEMS structure such that the MEMS cavity covers protected MEMS components. The cap structure is trimmed by cutting through to the cut capture cavity from the top of the cap structure without cutting all the way through to the MEMS structure.

US Patent:

8343369, Jan 1, 2013

Filed:

Jul 14, 2011

Appl. No.:

13/182924

Inventors:

Manolo G. Mena - Quezon, PH
Elmer S. Lacsamana - Pampanga, PH
William A. Webster - Tewksbury MA, US
Lawrence E. Felton - Hopkinton MA, US

Assignee:

Analog Devices, Inc. - Norwood MA

International Classification:

B44C 1/22

US Classification:

216 52, 216 99, 438691, 438692, 438702

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

20060027522, Feb 9, 2006

Filed:

Aug 9, 2004

Appl. No.:

10/914576

Inventors:

John Martin - Foxborough MA, US
Manolo Mena - Quezon City, PH
Elmer Lacsamana - Dau, PH
Michael Duffy - Londonderry NH, US
William Webster - Tewksbury MA, US
Lawrence Felton - Hopkinton MA, US
Maurice Karpman - Brookline MA, US

International Classification:

C23F 1/00
H01L 21/302

US Classification:

216002000, 438689000

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

20080225505, Sep 18, 2008

Filed:

May 29, 2008

Appl. No.:

12/129283

Inventors:

John R. Martin - Foxborough MA, US
Manolo G. Mena - Quezon City, PH
Elmer S. Lacsamana - Dau, PH
Michael P. Duffy - Londonderry NH, US
William A. Webster - Tewksbury MA, US
Lawrence E. Felton - Hopkinton MA, US
Maurice S. Karpman - Brookline MA, US

Assignee:

ANALOG DEVICES, INC. - Norwood MA

International Classification:

H01L 21/50
H05K 7/00

US Classification:

361820, 438113, 257E21499

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

43774148, Mar 22, 1983

Filed:

Sep 4, 1980

Appl. No.:

6/184069

Inventors:

John C. Buschmann - Columbia MD
Elizabeth L. Rasmussen - Hoth, DK
William C. Webster - Norristown PA
Preston L. Veltman - Severna Park MD

Assignee:

A/S Niro Atomizer

International Classification:

C04B 100

US Classification:

106 85

Abstract:

Strong dense shaped articles such as pellets suitable for use as gravel substitutes are produced by the described method from solid fly ash-containing water materials obtained by a lime based dry scrubbing flue gas desulfurization operation. In this method the dry ash-containing waste powder, which also contains calcium sulfite or sulfate reaction products and unreacted lime, is first uniformly contacted with a critical amount of water and then immediately compacted at a critical compaction ratio to provide a handleable green body in which the fly ash particles are positioned with respect to one another so that the interstitial spaces are sufficient to accommodate the volumetric changes in wthe cementitious materials without any deleterious expansion of the article as the article is cured.

Address:

1803 Le Suer Rd, Richmond, VA 23229

VIN:

2T1BR32E97C850833

Make:

TOYOTA

Model:

COROLLA

Year:

2007