William M Webster

US Patent:

6893574, May 17, 2005

Filed:

Oct 23, 2001

Appl. No.:

10/002953

Inventors:

Lawrence E. Felton - Hopkinton MA, US
Peter W. Farrell - Lunenburg MA, US
Jing Luo - Lexington MA, US
David J. Collins - Windham NH, US
John R. Martin - Foxborough MA, US
William A. Webster - Tewksbury MA, US

International Classification:

C23F001/00
H01L021/44
H01L021/48
H01L021/50

US Classification:

216 2, 438113

Abstract:

A MEMS capping method and apparatus uses a cap structure on which is formed a MEMS cavity, a cut capture cavity, and a cap wall. The cap wall is essentially the outer wall of the MEMS cavity and the inner wall of the cut capture cavity. The cap structure is bonded onto a MEMS structure such that the MEMS cavity covers protected MEMS components. The cap structure is trimmed by cutting through to the cut capture cavity from the top of the cap structure without cutting all the way through to the MEMS structure.

US Patent:

8343369, Jan 1, 2013

Filed:

Jul 14, 2011

Appl. No.:

13/182924

Inventors:

Manolo G. Mena - Quezon, PH
Elmer S. Lacsamana - Pampanga, PH
William A. Webster - Tewksbury MA, US
Lawrence E. Felton - Hopkinton MA, US

Assignee:

Analog Devices, Inc. - Norwood MA

International Classification:

B44C 1/22

US Classification:

216 52, 216 99, 438691, 438692, 438702

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

20060027522, Feb 9, 2006

Filed:

Aug 9, 2004

Appl. No.:

10/914576

Inventors:

John Martin - Foxborough MA, US
Manolo Mena - Quezon City, PH
Elmer Lacsamana - Dau, PH
Michael Duffy - Londonderry NH, US
William Webster - Tewksbury MA, US
Lawrence Felton - Hopkinton MA, US
Maurice Karpman - Brookline MA, US

International Classification:

C23F 1/00
H01L 21/302

US Classification:

216002000, 438689000

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

20080225505, Sep 18, 2008

Filed:

May 29, 2008

Appl. No.:

12/129283

Inventors:

John R. Martin - Foxborough MA, US
Manolo G. Mena - Quezon City, PH
Elmer S. Lacsamana - Dau, PH
Michael P. Duffy - Londonderry NH, US
William A. Webster - Tewksbury MA, US
Lawrence E. Felton - Hopkinton MA, US
Maurice S. Karpman - Brookline MA, US

Assignee:

ANALOG DEVICES, INC. - Norwood MA

International Classification:

H01L 21/50
H05K 7/00

US Classification:

361820, 438113, 257E21499

Abstract:

A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.

US Patent:

40186199, Apr 19, 1977

Filed:

Jan 22, 1976

Appl. No.:

5/651457

Inventors:

William C. Webster - Norristown PA
Charles L. Smith - Conshohocken PA

Assignee:

IU Technology Corporation - Miami FL

International Classification:

C04B 734

US Classification:

106118

Abstract:

Improved cementitious composition results from a process comprised of mechanical size reduction and activation of a mixture of lime and fly ash and the addition thereto of fly ash and aggregate, as needed, to make a mix of the desired proportions. A quicker and more complete reaction between the lime and fly ash results from deagglomeration of lime particles caused by interaction with the fly ash and/or by the increased availability of reactant materials due to particle size reduction of both the lime and the fly ash. The mechanical size reduction and activation process may be carried out, for example, in a ball mill or centrifugal impact mill.

US Patent:

40281302, Jun 7, 1977

Filed:

Nov 15, 1974

Appl. No.:

5/524148

Inventors:

William C. Webster - Norristown PA
Robert G. Hilton - Norristown PA
Ronald F. Cotts - Norristown PA

Assignee:

IU Conversion Systems, Inc. - Philadelphia PA

International Classification:

C04B 100

US Classification:

106120

Abstract:

Digested sewage sludge resulting from sewage plant treatment of municipal sewage is disposed of and used in an ecologically acceptable manner by the incorporation of such sludge in hardenable compositions further including, for example, lime, fly ash and, in some cases, alkaline earth metal sulfates and/or soil or other inert or complimentary additives. These hardenable compositions may be emplaced in an area open to the atmosphere and permitted to cure over a period of time to act as land fill or as road base materials.

US Patent:

43548768, Oct 19, 1982

Filed:

Sep 26, 1980

Appl. No.:

6/191065

Inventors:

William C. Webster - Norristown PA

Assignee:

Webster & Assoc. Ltd. - Norristown PA

International Classification:

C04B 100

US Classification:

106 85

Abstract:

Cured compacted products suitable for use as landfill materials, embankments, roadbase compositions and the like are produced by the described method from fly ash-containing waste materials obtained by a lime based dry scrubbing flue gas desulfurization operation. In this method the dry fly ash-containing waste powder, which also contains calcium sulfite or sulfate reaction products and unreacted lime, is contacted with a predetermined amount of water and mixed under critical mixing conditions to provide a powder/water mixture which is placed at a suitable utilization site, e. g. , a landfill disposal site, and compacted under sufficient load to achieve at least about 70% of the laboratory dry density. The resulting products have compressive strengths after curing of at least about 25 psi and permeabilities of less than 1. times. 10. sup. -5 cm/sec.

US Patent:

42592712, Mar 31, 1981

Filed:

May 4, 1979

Appl. No.:

6/036156

Inventors:

L. John Minnick - Cheltenham PA
William C. Webster - Norristown PA
Charles L. Smith - Conshohocken PA

International Classification:

B01J 202

US Classification:

264 8

Abstract:

Improved method for making generally spherical particulate shot-like product comprising permitting a siliceous-aluminous composition of specified characteristics onto a rotating squirrel cage rotor near top dead center thereof and causing said impinging molten material to be projected in droplet form and cooled while suspended in a gaseous cooling medium, such as air, into an amorphous generally spherical product, suitable for use as an abrasive or filler material.