Xing L Chen

age ~71

from Tracy, CA

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Also known as:

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Xing Chen Phones & Addresses

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Skills:

San
Xing
Classical

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Skills:

Microsoft Excel

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Location:

United States

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Description:

Ms. Chen works in Brooklyn, NY and 1 other location and specializes in Family Medicine. Ms. Chen is affiliated with New York Methodist Hospital.

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Author
Xing Chen

ISBN #
7101047750

Name / Title

Company / Classification

Phones & Addresses

Xing Zhou Chen

HONG KONG BUFFET 5858 LLC

Xing Chen

PHO BC, INC

Methods And Apparatus For Passivating A Target
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US Patent:

20220307126, Sep 29, 2022
Filed:

Jun 13, 2022
Appl. No.:

17/838805
Inventors:

- Santa Clara CA, US
Xing CHEN - Dublin CA, US
Keith A. MILLER - Mountain View CA, US
Jothilingam RAMALINGAM - Milpitas CA, US
Jianxin LEI - Fremont CA, US
International Classification:

C23C 14/34
H01J 37/32
Abstract:

Methods and apparatus for passivating a target are provided herein. For example, a method includes a) supplying an oxidizing gas into an inner volume of the process chamber; b) igniting the oxidizing gas to form a plasma and oxidize at least one of a target or target material deposited on a process kit disposed in the inner volume of the process chamber; and c) performing a cycle purge comprising: c1) providing air into the process chamber to react with the at least one of the target or target material deposited on the process kit; c2) maintaining a predetermined pressure for a predetermined time within the process chamber to generate a toxic by-product caused by the air reacting with the at least one of the target or target material deposited on the process kit; and c3) exhausting the process chamber to remove the toxic by-product.

Methods And Apparatus For Passivating A Target
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US Patent:

20210317568, Oct 14, 2021
Filed:

Apr 13, 2020
Appl. No.:

16/846505
Inventors:

- Santa Clara CA, US
Xing CHEN - Dublin CA, US
Keith A. MILLER - Mountain View CA, US
Jothilingam RAMALINGAM - Milpitas CA, US
Jianxin LEI - Fremont CA, US
International Classification:

C23C 14/34
H01J 37/32
Abstract:

Methods and apparatus for passivating a target are provided herein. For example, a method includes a) supplying an oxidizing gas into an inner volume of the process chamber; b) igniting the oxidizing gas to form a plasma and oxidize at least one of a target or target material deposited on a process kit disposed in the inner volume of the process chamber; and c) performing a cycle purge comprising: c1) providing air into the process chamber to react with the at least one of the target or target material deposited on the process kit; c2) maintaining a predetermined pressure for a predetermined time within the process chamber to generate a toxic by-product caused by the air reacting with the at least one of the target or target material deposited on the process kit; and c3) exhausting the process chamber to remove the toxic by-product.