Xing Lin - West Babylon NY, US Jennifer Y. Sun - Mountain View CA, US Sumanth Banda - San Jose CA, US
International Classification:
H02N 13/00 B32B 3/08 B32B 7/12
US Classification:
361234, 4284111, 428 68
Abstract:
Embodiments of the present invention provide chamber components having a protective element for shielding bonding material from processing environments in a processing environment. The protective element may include protective seals, protective structures, erosion resistive fillers, or combinations thereof. Embodiments of the present invention reduce erosion of bonding material used in a processing chamber, thus, improving processing quality and reducing maintenance costs.
Xing Lin (Chinese: ; pinyin: Xng Ln; born May 25, 1979 in Liaoning) is a female Chinese triathlete. Xing competed at the second Olympic triathlon at ...