Yong Jin Yi

US Patent:

61664782, Dec 26, 2000

Filed:

Jun 4, 1999

Appl. No.:

9/325967

Inventors:

Yong Wuk Yi - Montgomery IL
Chang Liu - Champaign IL

Assignee:

The Board of Trustees of the University of Illinois - Urbana IL

International Classification:

H01L 4104

US Classification:

310328

Abstract:

A microelectromechanical system (MEMS) includes at least two hinged flaps, each having a different amount of Permalloy or other magnetic material. The flaps are hinged at an angle to each other, and can be rotated off plane when placed in a magnetic field of sufficient strength. When placed in an increasing magnetic field, the flaps are raised asynchronously, at different times, due to the different amounts of Permalloy used in the flaps. As they are raised, the flaps interact with each other and become interlocked, even after the magnetic field is removed. In this manner, the devices can be assembled using a single magnetic field, without having actuators on the chip itself In another embodiment, at least one flap is provided with a spring beam which raises the magnetic field strength needed to raise the flap as compared to another flap. This also causes the flaps to operate asynchronously in an increasing magnetic field.