Zahirudeen M Premji

US Patent:

6363809, Apr 2, 2002

Filed:

Sep 7, 2000

Appl. No.:

09/656641

Inventors:

W. Thomas Novak - Hillsborough CA
Zahirudeen Premji - Boulder CO
Uday G. Nayak - San Jose CA
Akimitsu Ebihara - San Mateo CA

Assignee:

Nikon Corporation, Japan - Tokyo

International Classification:

G05G 1100

US Classification:

7449009, 7449013, 355 77, 108143, 384 12

Abstract:

An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam. A cable follower stage moves in the Y direction on the follower stage and supports the cables connecting to the main stage, thereby reducing cable drag. An air circulation system is provided in the magnetic tracks on the follower stage to remove heat from operation of the electromagnetic motors.

US Patent:

7260417, Aug 21, 2007

Filed:

May 4, 2004

Appl. No.:

10/838725

Inventors:

Mohamad H. El-Batal - Westminster CO, US
Thomas E. Richardson - Golden CO, US
Zahirudeen Premji - Boulder CO, US

Assignee:

LSI Corporation - Milpitas CA

International Classification:

H04M 1/00
H02J 7/14

US Classification:

4555521, 320104

Abstract:

A storage enterprise comprising multiple storage enterprise components coupled to exchange signals via respective wireless interfaces. The signals exchanged may include power signals and/or information signals. Power signals may be exchanged by an inductive coupling (wireless) between a first component and a second component. Information signals may include command/status and data signals exchanged between a first component and a second component. Any of several hierarchies of the connections in a storage enterprise may utilize such wireless connections. Exemplary wireless connection may include: storage controller to storage device or storage enclosure, storage enclosure to storage device, SAN appliance to storage device or storage enclosure or storage controller, computing node to storage device or storage enclosure or storage controller or SAN appliance.

US Patent:

7260423, Aug 21, 2007

Filed:

May 4, 2004

Appl. No.:

10/838726

Inventors:

Thomas E. Richardson - Golden CO, US
Zahirudeen Premji - Boulder CO, US
Mohamad H. El-Batal - Westminster CO, US

Assignee:

LSI Corporation - Milpitas CA

International Classification:

H04B 1/38
H04B 7/00

US Classification:

455572, 455 411, 455 412

Abstract:

A circuit providing a wireless connection for receipt and/or transmission of electronic signals between a storage device and an external device such as a host system, a storage subsystem controller, or a storage subsystem. The wireless connection circuit may include a wireless data connection to provide wireless exchange of data signals between the storage device and the external device. The wireless connection circuit may also provide an inductive coupling for power supplied to the storage device. In one aspect hereof the wireless connectivity (data, power or both) may be provided as enhanced circuits on a controller circuit integrated with the storage device. In another aspect hereof, the wireless connectivity may be provided as an adapter or interface circuit coupled to an existing storage device interface to adapt wired connections of the storage device to an external device through a wireless signal exchange protocol.

US Patent:

51050765, Apr 14, 1992

Filed:

Aug 8, 1990

Appl. No.:

7/564404

Inventors:

Zahirudeen Premji - Boulder CO

Assignee:

Nikon Corporation - Tokyo

International Classification:

G01J 120

US Classification:

2502015

Abstract:

An objective lens having chromatic aberration is disposed in an optical system for focusing recording and/or reproducing light beams upon a surface of an optical disc, and two detecting light beams having different wavelengths are passed through the lens. When the surface of the optical disc is positioned at a focal point of one of the beams, the other beam is not focused on the optical disc. When the surface of the disc is positioned midway between the focal points of the two beams, two light spots formed on the optical disc by the two beams have equal intensity. The light intensity of the two spots is detected, so that focusing errors can be determined based on the difference between the detected intensities.

US Patent:

6134981, Oct 24, 2000

Filed:

Dec 3, 1999

Appl. No.:

9/454691

Inventors:

W. Thomas Novak - Hillsborough CA
Zahirudeen Premji - Boulder CO
Uday G. Nayak - San Jose CA
Akimitsu Ebihara - San Mateo CA

Assignee:

Nikon Research Corporation of America - Belmont CA

International Classification:

G05G 1100

US Classification:

7449009

Abstract:

An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam. A cable follower stage moves in the Y direction on the follower stage and supports the cables connecting to the main stage, thereby reducing cable drag. An air circulation system is provided in the magnetic tracks on the follower stage to remove heat from operation of the electromagnetic motors.

US Patent:

56238533, Apr 29, 1997

Filed:

Oct 19, 1994

Appl. No.:

8/325740

Inventors:

W. Thomas Novak - Hillsborough CA
Zahirudeen Premji - Boulder CO
Uday G. Nayak - San Jose CA
Akimitsu Ebihara - San Mateo CA

Assignee:

Nikon Precision Inc. - Belmont CA

International Classification:

G05G 1100

US Classification:

7449009

Abstract:

An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam. A cable follower stage moves in the Y direction on the follower stage and supports the cables connecting to the main stage, thereby reducing cable drag. An air circulation system is provided in the magnetic tracks on the follower stage to remove heat from operation of the electromagnetic motors.

US Patent:

59964375, Dec 7, 1999

Filed:

Feb 11, 1997

Appl. No.:

8/799674

Inventors:

W. Thomas Novak - Hillsborough CA
Zahirudeen Premji - Boulder CO
Uday G. Nayak - San Jose CA
Akimitsu Ebihara - San Mateo CA

Assignee:

Nikon Corporation - Tokyo

International Classification:

G05G 1100

US Classification:

7449009

Abstract:

An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) difection and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam. A cable follower stage moves in the Y direction on the follower stage and supports the cables connecting to the main stage, thereby reducing cable drag. An air circulation system is provided in the magnetic tracks on the follower stage to remove heat from operation of the electromagnetic motors.

US Patent:

49911600, Feb 5, 1991

Filed:

Feb 20, 1990

Appl. No.:

7/483297

Inventors:

Zahirudeen Premji - Boulder CO

Assignee:

Nikon Precision Inc. - San Bruno CA

International Classification:

G11B 1114
G11B 7125

US Classification:

369 4412

Abstract:

An integrated optical device for magneto-optical recording and/or reading employs elements that may be fabricated on a substrate using semiconductor manufacturing technology. Such elements include, but are not limited to, a system of waveguides for transmitting light energy beams from lasers to end portions of the waveguides exposed to the outside of the substrate, and from those end portions to detectors, so that reading, writing, focusing, and tracking operations may be performed. The waveguide systems include, e. g. , polarization controllers and mode splitters.