Zongqiang Qiang Yu

US Patent:

7046355, May 16, 2006

Filed:

Jan 28, 2005

Appl. No.:

11/046493

Inventors:

Zongqiang Yu - Santa Clara CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 21/88

US Classification:

3562372, 3562374, 3562375, 356394, 382145

Abstract:

A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate. The defect identification of the substrate is performed using transmitted and reflected light signals from a baseline comparison between two specimens, or one specimen and a database representation, to form a calibration pixelated training set including a non-defective region. This calibration pixilated training set is compared to a transmitted-reflected plot map of the subject specimen to assess surface quality.

US Patent:

7295301, Nov 13, 2007

Filed:

May 8, 2006

Appl. No.:

11/430681

Inventors:

Zongqiang Yu - Santa Clara CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 21/88

US Classification:

3562372, 3562374, 3562375, 356394, 382145

Abstract:

A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate. The defect identification of the substrate is performed using transmitted and reflected light signals from a baseline comparison between two specimens, or one specimen and a database representation, to form a calibration pixelated training set including a non-defective region. This calibration pixilated training set is compared to a transmitted-reflected plot map of the subject specimen to assess surface quality.

US Patent:

7580124, Aug 25, 2009

Filed:

Oct 10, 2007

Appl. No.:

11/974033

Inventors:

Zongqiang Yu - Santa Clara CA, US

Assignee:

KLA-Tencor Technologies Corp. - Milpitas CA

International Classification:

G01N 21/88

US Classification:

3562372, 3562374, 3562375, 356394, 382145

Abstract:

A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate. The defect identification of the substrate is performed using transmitted and reflected light signals from a baseline comparison between two specimens, or one specimen and a database representation, to form a calibration pixelated training set including a non-defective region. This calibration pixilated training set is compared to a transmitted-reflected plot map of the subject specimen to assess surface quality.

US Patent:

6850321, Feb 1, 2005

Filed:

Jul 9, 2002

Appl. No.:

10/191765

Inventors:

Zongqiang Yu - Santa Clara CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 2188

US Classification:

3562374, 3562375, 382145

Abstract:

A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate. The defect identification of the substrate is performed using transmitted and reflected light signals from a baseline comparison between two specimens, or one specimen and a database representation, to form a calibration pixelated training set including a non-defective region. This calibration pixilated training set is compared to a transmitted-reflected plot map of the subject specimen to assess surface quality.

US Patent:

20160327138, Nov 10, 2016

Filed:

Jun 3, 2015

Appl. No.:

14/730136

Inventors:

- Beijing, CN
Zongqiang Yu - San Jose CA, US

International Classification:

F16H 19/00

Abstract:

A drive mechanism is described. One of the objectives, advantages and benefits of the drive mechanism is that is has high precision in rotation, great reliability and durability life, no backlash, and no particle contamination. It is very useful in high precision rotation driving processes for opto-mechanical inspection systems that require high movement precision and no-contamination. In one embodiment, two pulleys are used with their axes to be parallel from each other, two bands are used to rotate the pulleys in opposite directions. An eccentric disk mechanism is used to fine-tune the distance between the two pulleys so that tensions on the two bands can be optimized.