Brian D Cunningham

US Patent:

6688158, Feb 10, 2004

Filed:

Sep 11, 2002

Appl. No.:

10/241347

Inventors:

Brian T. Cunningham - Lexington MA
John R. Williams - Lexington MA

Assignee:

The Charles Stark Draper Laboratory, Inc. - Cambridge MA

International Classification:

G01N 2902

US Classification:

73 2406, 73 6175, 422 69, 438 49

Abstract:

A method for manufacturing a flexural plate wave sensor including the steps of depositing a sacrificial material layer over a silicon substrate, depositing a membrane layer over the sacrificial material layer with the membrane layer covering the sacrificial material layer and contacting the silicon substrate, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer, forming a second transducer on the piezoelectric layer, spaced from the first transducer, removing the sacrificial material layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.

US Patent:

6837097, Jan 4, 2005

Filed:

Jun 6, 2003

Appl. No.:

10/455838

Inventors:

Brian T. Cunningham - Lexington MA, US
John R. Williams - Lexington MA, US

Assignee:

The Charles Stark Draper Laboratory, Inc. - Cambridge MA

International Classification:

G01N 2902

US Classification:

73 2406, 73 6175, 422 69, 438 49

Abstract:

A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.

US Patent:

6851297, Feb 8, 2005

Filed:

Dec 19, 2002

Appl. No.:

10/324685

Inventors:

Brian T. Cunningham - Lexington MA, US
John Williams - Lexington MA, US

Assignee:

The Charles Stark Draper Laboratory, Inc. - Cambridge MA

International Classification:

G01N029/02
H01L021/02

US Classification:

73 2406, 73 6175, 422 69, 438 49

Abstract:

A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.

US Patent:

6951715, Oct 4, 2005

Filed:

Jan 28, 2002

Appl. No.:

10/058626

Inventors:

Brian T. Cunningham - Lexington MA, US
Jane Pepper - North Andover MA, US
Bo Lin - Arlington MA, US
Peter Li - Andover MA, US
Homer Pien - Andover MA, US
Jean Qiu - Andover MA, US

Assignee:

SRU Biosystems, Inc. - Woburn MA

International Classification:

C12Q001/00
G01N033/543

US Classification:

435 4, 264 131, 264 19, 359130, 359566, 359569, 359570, 359571, 359572, 359576, 385 12, 385 37, 385130, 385131, 422 8211, 427 211, 427 213, 427162, 435 5, 435 6, 435 72, 435 732, 436501, 436524, 436525, 436527, 436531, 436164, 436805

Abstract:

Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also provides optical devices useful as narrow band filters.

US Patent:

6990259, Jan 24, 2006

Filed:

Mar 29, 2004

Appl. No.:

10/812635

Inventors:

Brian T. Cunningham - Lexington MA, US

Assignee:

SRU Biosystems, Inc. - Woburn MA

International Classification:

G02B 6/00

US Classification:

385 12, 4352887

Abstract:

A biosensor is described having the form of a photonic crystal having defect cavities formed in a periodic pattern in the device. The invention provides a higher sensitivity and a greater degree of spatial localization of incoupled photons than previously reported photonic crystal biosensor devices.

US Patent:

7000453, Feb 21, 2006

Filed:

May 12, 2004

Appl. No.:

10/844278

Inventors:

Brian T. Cunningham - Lexington MA, US
John R. Williams - Lexington MA, US

Assignee:

The Charles Stark Draper Laboratory, Inc. - Cambridge MA

International Classification:

G01N 29/02

US Classification:

73 2406, 73 6175, 73580, 422 69

Abstract:

A flexural plate wave sensor array includes a substrate, and a plurality of flexural plate wave sensors, each sensor including a cavity formed in the substrate, a thin film membrane layer spanning the cavity, a piezoelectric layer disposed on the thin film membrane layer, a transducer disposed on the piezoelectric layer and an absorptive coating disposed on said thin film membrane layer within the cavity. The cavity of each of the sensors includes interior walls which are substantially parallel to each other and to the interior walls of adjacent sensors.

US Patent:

7023544, Apr 4, 2006

Filed:

Jun 26, 2002

Appl. No.:

10/180374

Inventors:

Brian T. Cunningham - Lexington MA, US
Peter Y. Li - Andover MA, US

Assignee:

SRU Biosystems, Inc. - Woburn MA

International Classification:

G01J 3/28

US Classification:

356326, 356328

Abstract:

Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An instrument system for detecting a biochemical interaction on a biosensor. The system includes an array of detection locations comprises a light source for generating collimated white light. A beam splitter directs the collimated white light towards a surface of a sensor corresponding to the detector locations. A detection system includes an imaging spectrometer receiving the reflected light and generating an image of the reflected light.

US Patent:

7070987, Jul 4, 2006

Filed:

Jan 28, 2002

Appl. No.:

10/059060

Inventors:

Brian T. Cunningham - Lexington MA, US
Jane Pepper - North Andover MA, US
Bo Lin - Arlington MA, US
Peter Li - Andover MA, US
Jean Qiu - Andover MA, US
Homer Pien - Andover MA, US

Assignee:

SRU Biosystems, Inc. - Woburn MA

International Classification:

C12M 3/00

US Classification:

4352871, 422 55, 422 57, 422 8205, 422 8211, 435 5, 435 6, 435 721, 435 732, 4352872, 4352887, 435808, 436164, 436165, 436518, 436524, 436525, 436527, 436531, 436805, 356418

Abstract:

Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also provides optical devices useful as narrow band filters.