Brian Wade Hall

US Patent:

48923435, Jan 9, 1990

Filed:

Oct 5, 1988

Appl. No.:

7/253689

Inventors:

Brian E. Hall - Mesa AZ

International Classification:

B66C 102
B25J 1506

US Classification:

294 641

Abstract:

A vacuum pencil for transporting semiconductor wafers includes a relatively flat, planar frame member having an enlarged end with a circular hole formed therein. A handle is coupled to the other end of the flat frame member. A relatively flat, deformable elastic member is positioned adjacent and below the enlarged end of the flat frame member and concentric with the hole formed therein. A lever member has a relatively flat first end lying closely adjacent to the flat frame member. The flat first end of the lever member is connected to the center of the deformable elastic member, and an opposing second end of the flat frame member is adapted to be depressed by the user, thereby causing the flat first end to raise the center of the deformable elastic member. When the deformable elastic member is in contact with the semiconductor wafer depression of the lever member creates, a temporary vacuum attachment is created between the deformable elastic membrane and the semiconductor wafer, permitting the semiconductor wafer to be safely lifted and transported.