Cristan L Ellison

US Patent:

53709128, Dec 6, 1994

Filed:

Jul 20, 1993

Appl. No.:

8/094908

Inventors:

Louis K. Bigelow - Salt Lake City UT
James T. Hoggins - Sandy UT
Deborah Gunderson - Salt Lake City UT
Cristan Ellison - Salt Lake City UT

Assignee:

Norton Company - Worcester MA

International Classification:

B05D 306

US Classification:

427575

Abstract:

A method for depositing diamond film on a substrate utilizing a tuneable microwave cavity with an adjustable height and antenna and an electrically insulated chamber comprises the steps of decreasing the pressure within the chamber, creating a plasma including hydrogen gas within the chamber, tuning the cavity by varying its height and the depth of insertion of the antenna to minimize reflected power and properly position the plasma on the substrate, injecting a hydrocarbon gas into the chamber, and maintaining the plasma for a sufficient time for diamond film of the desired thickness to be deposited.