Eric M Bailey

US Patent:

7929143, Apr 19, 2011

Filed:

Dec 8, 2008

Appl. No.:

12/330419

Inventors:

Ray Wilfinger - Palm Harbor FL, US
Eric Bailey - New Port Richey FL, US
Carl Wingard - Oldsmar FL, US

Assignee:

Honeywell International Inc. - Morristown NJ

International Classification:

G01B 9/02

US Classification:

356460, 356 73

Abstract:

An integrated interferometric gyroscope and accelerometer device. An example device includes a cantilever beam, a package having a post connected to one end of the beam, a piezoresistor driver, a piezoresistor sensor, and a semiconductor interferometric optical gyro. The piezoresistor driver is incorporated within the beam at a first area proximate to the post. The driver electro-thermally resonates the beam. The piezoresistor sensor is incorporated within the beam at the first area. The sensor piezoresitively senses a signal that relates to an acceleration force out-of-plane of the beam. The semiconductor interferometric optical gyro is also incorporated within the beam at a second area of the beam. The gyro senses rotational motion about an axis approximately equivalent to the acceleration force out-of-plane of the beam. The gyro includes a waveguide, a laser source and a light detector.