Dan Maydan - Los Altos Hills CA Sasson Somekh - Redwood City CA Mei Cheng - San Jose CA David Cheng - San Jose CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01L 21306 B44C 122 C03C 1500 C03C 2506
US Classification:
156643
Abstract:
A magnetically-enhanced, variable magnetic field, RIE mode plasma etch process for etching materials such as dielectrics and polycrystalline, is disclosed. The variable magnetic field permits optimization of selected characteristics such as etch rate, etch selectivity, ion bombardment and radiation damage, etch uniformity, and etch anisotropy.
Name / Title
Company / Classification
Phones & Addresses
Mei Chiu Cheng President
GRAND J&K CORP Mfg Wood Kitchen Cabinets
30118 Eigenbrodt Way, Union City, CA 94587 5103245588
Dr. Cheng graduated from the University of Kansas School of Medicine in 1986. She works in Wichita, KS and specializes in Pediatrics. Dr. Cheng is affiliated with Via Christi Hospital and Wesley Medical Center.