Billy Tk Leung

US Patent:

7440091, Oct 21, 2008

Filed:

Oct 26, 2004

Appl. No.:

10/973116

Inventors:

William A. Bagley - Tokyo, JP
Paohuei Lee - San Jose CA, US
Kyung-Tae Kim - Suwon, KR
Sam-Kyung Kim - Kumi, KR
Toshio Kiyotake - Hyogo, JP
Sam Kim - Fremont CA, US
Takayuki Matsumoto - Santa Clara CA, US
Jonathan Erik Larson - East Palo Alto CA, US
Makoto Inagawa - Palo Alto CA, US
James Hoffman - San Jose CA, US
Billy C. Leung - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G01N 21/00

US Classification:

3562372

Abstract:

An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

US Patent:

7575220, Aug 18, 2009

Filed:

Jun 14, 2004

Appl. No.:

10/867100

Inventors:

Yoshiaki Tanase - San Jose CA, US
Billy C. Leung - Sunnyvale CA, US
Gregory S. Lewis - Mountain View CA, US
David E. Berkstresser - Los Gatos CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

F16K 25/00

US Classification:

251177, 251303, 251334, 49 40, 414221

Abstract:

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.

US Patent:

7641247, Jan 5, 2010

Filed:

Dec 17, 2002

Appl. No.:

10/321826

Inventors:

Wendell T. Blonigan - Union City CA, US
Takayuki Matsumoto - Santa Clara CA, US
William N. Sterling - Santa Clara CA, US
Billy C. Leung - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B25J 15/00
B65G 49/07

US Classification:

294 11, 294902, 414941

Abstract:

Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for supporting a quadrilateral substrate during substrate transfer includes an end effector having an inner edge support disposed on a first end and a first outer edge support disposed on a distal end. The first end of the end effector is adapted for coupling to a robot linkage. The first inner edge support has a face that is oriented parallel to and facing the face of the first outer edge support. This configuration of edge supports captures the substrate to the end effector thereby minimizing substrate slippage during transfer. In another embodiment, lateral guides may be utilized to further enhance capturing the substrate along the edges of the substrate open between the inner and outer edge supports.

US Patent:

7834994, Nov 16, 2010

Filed:

Oct 21, 2008

Appl. No.:

12/255629

Inventors:

William A. Bagley - Tokyo, JP
Paohuei Lee - San Jose CA, US
Kyung-Tae Kim - Suwon, KR
Sam-Kyung Kim - Kumi, KR
Toshio Kiyotake - Hyogo, JP
Sam Kim - San Ramon CA, US
Takayuki Matsumoto - Santa Clara CA, US
Jonathan Erik Larson - East Palo Alto CA, US
Makoto Inagawa - Palo Alto CA, US
James Hoffman - San Jose CA, US
Billy C. Leung - Fremont CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G01N 21/00

US Classification:

3562372

Abstract:

An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.

US Patent:

8648977, Feb 11, 2014

Filed:

Aug 1, 2005

Appl. No.:

11/194503

Inventors:

Billy C. Leung - Fremont CA, US
David E. Berkstresser - Los Gatos CA, US
Shinichi Kurita - San Jose CA, US

Assignee:

Applied Materials, INC. - Santa Clara CA

International Classification:

G02F 1/1333

US Classification:

349 58, 220378

Abstract:

A method is provided that includes isolating a sealing surface from a chamber wall of a chamber and sealing the chamber between the sealing surface and the chamber wall. An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.