Chingwen P Yeh

US Patent:

8058182, Nov 15, 2011

Filed:

Jul 1, 2009

Appl. No.:

12/495827

Inventors:

Chingwen Yeh - Cupertino CA, US
James B. Boyce - Los Altos CA, US
Kathleen Boyce, legal representative - Los Altos CA, US
Jingkuang Chen - Rochester NY, US
Feixia Pan - Cypress CA, US
Joel A. Kubby - Rochester NY, US

Assignee:

Xerox Corporation - Norwalk CT

International Classification:

H01L 21/469

US Classification:

438763, 438393, 29 2535

Abstract:

Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.

US Patent:

20020067533, Jun 6, 2002

Filed:

Dec 6, 2000

Appl. No.:

09/731339

Inventors:

Decai Sun - Los Altos CA, US
Michel Rosa - San Jose CA, US
Chingwen Yeh - Cupertino CA, US

Assignee:

XEROX CORPORATION

International Classification:

G02B026/08

US Classification:

359/198000, 359/224000

Abstract:

A micro-optical-electrical-mechanical laser scanner is configured from a silicon-on-insulator substrate having a silicon substrate layer, a buried oxide layer, and a single crystal silicon device layer. A first device layer portion having a micro-mirror fabricated therefrom. A laser is connected to a second device layer portion, and a hinge connects the first device layer portion and the second device layer portion. The hinge is formed with a bimorph material, wherein the bimorph material creates built-in stresses in the hinge. The bimorph hinge moves the released micro-mirror out of the horizontal plane to a position for either directly or indirectly reflecting laser light emitted from the laser.