Chingwen Yeh - Cupertino CA, US James B. Boyce - Los Altos CA, US Kathleen Boyce, legal representative - Los Altos CA, US Jingkuang Chen - Rochester NY, US Feixia Pan - Cypress CA, US Joel A. Kubby - Rochester NY, US
Assignee:
Xerox Corporation - Norwalk CT
International Classification:
H01L 21/469
US Classification:
438763, 438393, 29 2535
Abstract:
Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.
Decai Sun - Los Altos CA, US Michel Rosa - San Jose CA, US Chingwen Yeh - Cupertino CA, US
Assignee:
XEROX CORPORATION
International Classification:
G02B026/08
US Classification:
359/198000, 359/224000
Abstract:
A micro-optical-electrical-mechanical laser scanner is configured from a silicon-on-insulator substrate having a silicon substrate layer, a buried oxide layer, and a single crystal silicon device layer. A first device layer portion having a micro-mirror fabricated therefrom. A laser is connected to a second device layer portion, and a hinge connects the first device layer portion and the second device layer portion. The hinge is formed with a bimorph material, wherein the bimorph material creates built-in stresses in the hinge. The bimorph hinge moves the released micro-mirror out of the horizontal plane to a position for either directly or indirectly reflecting laser light emitted from the laser.
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