- Spring Green WI, US Christopher L. Gruber - Plain WI, US Klaus H.W. Hartig - Avoca WI, US
International Classification:
H01J 37/32
US Classification:
20419213, 20429803
Abstract:
A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.
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