Jeffrey M. Campbell - Foxboro MA, US J. Karl Niermeyer - Tyngsboro MA, US Gastón de los Reyes - Boston MA, US Christopher R. Wargo - Wellesley MA, US Richard L. Miller - Needham MA, US Stephen K. Guerrera - Holliston MA, US
Assignee:
Mykrolis Corporation - Billerica MA
International Classification:
F16L 39/00
US Classification:
285 26, 2851241, 2851243
Abstract:
A connector apparatus is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.
Fluid Flow Measuring And Proportional Fluid Flow Control Device
Christopher Wargo - Wellesley MA, US J. Karl Niermeyer - Tyngsboro MA, US Craig L. Brodeur - Marlborough MA, US William Basser - North Adams MA, US
Assignee:
Entegris, Inc. - Chaska MN
International Classification:
G06F 19/00
US Classification:
702 50, 73 125
Abstract:
The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.
Fluid Flow Measuring And Proportional Fluid Flow Control Device
Christopher Wargo - Wellesley MA, US J. Karl Niermeyer - Tyngsboro MA, US Craig L. Brodeur - Marlborough MA, US William Basser - North Adams MA, US
Assignee:
Entegris, Inc. - Chaska MN
International Classification:
G06F 19/00
US Classification:
702 50
Abstract:
Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can be adjusted by application of fuzzy logic which involves quantizing input variables into the degree to which a small set of logical values is true. In one embodiment, variables related to flow rate and change in flow rate over time can be compared to membership functions to generate fuzzy inputs, based upon which fuzzy outputs can be generated.
Fluid Flow Measuring And Proportional Fluid Flow Control Device
Christopher Wargo - Wellesley MA, US J. Karl Niermeyer - Tyngsboro MA, US Craig L. Brodeur - Malborough MA, US William Basser - North Adams MA, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
G06F 19/00
US Classification:
702 50, 73 116
Abstract:
Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.
Christopher Wargo - Wellesley MA, US Thomas LeBlanc - Mendon MA, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
B29C 45/17 C08J 9/06
US Classification:
264 54, 264239, 15102
Abstract:
A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process.
Fluid Flow Measuring And Proportional Fluid Flow Control Device
Christopher Wargo - Wellesley MA, US J. Karl Niermeyer - Tyngsboro MA, US Craig L. Brodeur - Marlborough MA, US William Basser - North Adams MA, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
G06F 19/00
US Classification:
702 50, 73 116
Abstract:
Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.
Christopher Wargo - Wellesley MA, US Thomas LeBlanc - Mendon MA, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
B29C 45/17 C08J 9/06 B08B 11/00
US Classification:
134 6, 15102, 264 54, 264239
Abstract:
A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded form a two piece mold and the openings can have draft angles to facilitate the molding process.
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