Connie Lam

US Patent:

20100332012, Dec 30, 2010

Filed:

Sep 8, 2009

Appl. No.:

12/555674

Inventors:

Chung-Ho Huang - San Jose CA, US
Vijayakumar C. Venugopal - Berkeley CA, US
Connie Lam - Los Altos CA, US
Dragan Podlesnik - Palo Alto CA, US

International Classification:

G05B 9/02
G06F 9/50
G06F 11/20

US Classification:

700110, 718105, 714 11, 714E11072

Abstract:

A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.

US Patent:

6622286, Sep 16, 2003

Filed:

Jun 30, 2000

Appl. No.:

09/608599

Inventors:

Tuan Ngo - Milpitas CA
Farro Kaveh - Palo Alto CA
Connie Lam - Los Altos CA
Chung-Ho Huang - Fremont CA
Tuqiang Ni - Fremont CA
Anthony T. Le - San Jose CA
Steven Salkow - Pleasanton CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

G06F 1750

US Classification:

716 1, 716 19, 700121

Abstract:

A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.