Gregory S Wilson

US Patent:

20130075265, Mar 28, 2013

Filed:

Nov 20, 2012

Appl. No.:

13/681933

Inventors:

Applied Materials Inc. - Santa Clara CA, US
Gregory J. Wilson - Kalispell MT, US
Daniel J. Woodruff - Kalispell MT, US

Assignee:

APPLIED MATERIALS INC. - Santa Clara CA

International Classification:

C25D 7/12
C25F 3/30

US Classification:

205 87, 205 80, 205640

Abstract:

Methods for electrochemically processing microfeature wafers using at least one counter electrode in a vessel, a supplementary electrode and a supplementary virtual electrode. The supplementary electrode is configured to operate independently from the counter electrode in the vessel, and it can be a thief electrode and/or a de-plating electrode depending. The supplementary electrode can further be used as another counter electrode during a portion of a plating cycle or polishing cycle. The supplementary virtual electrode is located in the processing zone, and it is configured to counteract an electric field offset relative to the wafer associated with an offset between the wafer and the counter electrode.

US Patent:

D3440982, Feb 8, 1994

Filed:

May 5, 1992

Appl. No.:

7/878897

Inventors:

Gregory J. Wilson - Scotts Valley CA

US Classification:

D20 3

US Patent:

20220208531, Jun 30, 2022

Filed:

Dec 26, 2020

Appl. No.:

17/134280

Inventors:

- Santa Clara CA, US
Jared Ahmad Lee - San Jose CA, US
Rakesh Ramadas - Santa Clara CA, US
Dmitry A. Dzilno - Sunnyvale CA, US
Gregory J. Wilson - Kalispell MT, US
Sriharish Srinivasan - Bangalore, IN

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01J 37/32

Abstract:

The disclosure describes a plasma source assemblies comprising a differential screw assembly, an RF hot electrode, a top cover, an upper housing and a lower housing. The differential screw assembly is configured to provide force to align the plasma source assembly vertically matching planarity of a susceptor. More particularly, the differential screw assembly increases a distance between the top cover and the upper housing to align the gap with the susceptor. The disclosure also provides a better thermal management by cooling fins. A temperature capacity of the plasma source assemblies is extended by using titanium electrode. The disclosure provides a cladding material covering a portion of a first surface of RF hot electrode, a second surface of RF hot electrode, a bottom surface of RF hot electrode, a portion of a surface of the showerhead and a portion of lower housing surface.

US Patent:

20210070552, Mar 11, 2021

Filed:

Nov 10, 2020

Appl. No.:

17/094411

Inventors:

- Moorestown NJ, US
Alexander Stevens - Philadelphia PA, US
Robert DeWitt - Marlton NJ, US
James Walsh - Pittsford NY, US
Gregory Wilson - Moorestown NJ, US

International Classification:

B65G 43/08
B07C 3/08
B65G 1/137
B65G 1/04

Abstract:

A method and apparatus are provided for sorting items to a plurality of sort destinations. The items are fed into the apparatus at an input station having a scanning station. The scanning station evaluates one or more characteristics of each item. The items are then loaded onto one of a plurality of independently controlled delivery vehicles. The delivery vehicles are individually driven to sort destinations. Once at the appropriate sort destination, the delivery vehicle ejects the item to the sort destination and returns to receive another item to be delivered. A re-induction conveyor may be provided for receiving select items from the vehicles and conveying the items back to the input station for re-processing. Additionally, a controller is provided to control the movement of the vehicles based on a characteristic each item being delivered by each vehicle. The system may also include vehicles having edge-detection assemblies for detecting items being loaded onto or discharged from the vehicles.

US Patent:

20200062512, Feb 27, 2020

Filed:

Oct 30, 2019

Appl. No.:

16/669003

Inventors:

- Moorestown NJ, US
Alexander Stevens - Philadelphia PA, US
Monty McVaugh - Mount Holly NJ, US
James Walsh - Pittsford NY, US
Gregory Wilson - Moorestown NJ, US

International Classification:

B65G 43/08
B07C 3/08
B65G 1/137
B65G 1/04

Abstract:

A method and apparatus are provided for sorting items to a plurality of sort destinations. The items are fed into the apparatus at an input station having a scanning station. The scanning station evaluates one or more characteristics of each item. The items are then loaded onto one of a plurality of independently controlled delivery vehicles. The delivery vehicles are individually driven to sort destinations. Once at the appropriate sort destination, the delivery vehicle ejects the item to the sort destination and returns to receive another item to be delivered. A re-induction conveyor may be provided for receiving select items from the vehicles and conveying the items back to the input station for re-processing. Additionally, a controller is provided to control the movement of the vehicles based on a characteristic each item being delivered by each vehicle. The system may also include vehicles having an assembly for detecting items being loaded onto or discharged from the vehicles.

US Patent:

20190160493, May 30, 2019

Filed:

Aug 11, 2017

Appl. No.:

16/082465

Inventors:

- Seattle WA, US
Robert R. DEWITT - Marlton NJ, US
Monty MCVAUGH - Mount Holly NJ, US
Alexander STEVENS - Philadelphia PA, US
James WALSH - Pittsford NY, US
Gregory WILSON - Moorestown NJ, US

International Classification:

B07C 5/10
B07C 5/34

Abstract:

In an exemplary embodiment, an apparatus () and associated method for sorting a plurality of items includes a plurality of sort destinations and a plurality of delivery vehicles () for delivering items to the sort destinations. Each vehicle () includes a surface () for supporting items to be delivered and an edge-detection assembly () for detecting an edge of an item when the item is conveyed onto or discharged from the vehicle. The edge-detection assembly () includes an emitter for emitting a beam of light toward the surface. The emitter () is positioned below the surface so that the beam of light is projected transverse the surface. The emitter edge-detection assembly also includes a plurality of detectors for detecting the beam of light, wherein an object on the surface of the vehicle affects the beam of light received by the detectors.

US Patent:

20170260008, Sep 14, 2017

Filed:

May 3, 2017

Appl. No.:

15/586247

Inventors:

- Moorestown NJ, US
Alexander Stevens - Philadelphia PA, US
Monty McVaugh - Mount Holly NJ, US
James Walsh - Pittsford NY, US
Gregory Wilson - Moorestown NJ, US

International Classification:

B65G 43/08
B65G 13/02
B65G 1/04

Abstract:

A method and apparatus are provided for sorting items to a plurality of sort destinations. The items are fed into the apparatus at an input station having a scanning station. The scanning station evaluates one or more characteristics of each item. The items are then loaded onto one of a plurality of independently controlled delivery vehicles. The delivery vehicles are individually driven to sort destinations. Once at the appropriate sort destination, the delivery vehicle ejects the item to the sort destination and returns to receive another item to be delivered. A re-induction conveyor may be provided for receiving select items from the vehicles and conveying the items back to the input station for re-processing. Additionally, a controller is provided to control the movement of the vehicles based on a characteristic each item being delivered by each vehicle. The system may also include vehicles having edge-detection assemblies for detecting items being loaded onto or discharged from the vehicles.

US Patent:

20170145582, May 25, 2017

Filed:

Feb 2, 2017

Appl. No.:

15/423298

Inventors:

- Santa Clara CA, US
George Mattinger - Cupertino CA, US
Gregory J. Wilson - Kalispell MT, US
Eric A. Englhardt - Palo Alto CA, US
Balamurugan Ramasamy - Bangalore, IN

International Classification:

C25D 17/00

Abstract:

A seal ring for an electrochemical processor does not slip or deflect laterally when pressed against a wafer surface. The seal ring may be on a rotor of the processor, with the seal ring having an outer wall joined to a tip arc through an end. The outer wall may be a straight wall. A relatively rigid support ring may be attached to the seal ring, to provide a more precise sealing dimension. Knife edge seal rings that slip or deflect laterally on the wafer surface may also be used. In these designs, the slipping is substantially uniform and consistent, resulting in improved performance.