Jason L Cain

US Patent:

7373215, May 13, 2008

Filed:

Aug 31, 2006

Appl. No.:

11/469206

Inventors:

Jason Phillip Cain - Sunnyvale CA, US
Bhanwar Singh - Morgan Hill CA, US
Iraj Emami - Austin TX, US

Assignee:

Advanced Micro Devices, Inc. - Sunnyvale CA

International Classification:

G06F 19/00

US Classification:

700121, 700 29

Abstract:

The claimed subject matter can provide a mechanism for ascertaining a variety of metrological data relating to one or more features (e. g. , a transistor gate) of a chip/wafer. In addition, results of electrical testing on the chip/wafer can also be gathered and, together with the metrological data, input to a data store. From the information in the data store, a three-dimensional model for the feature(s) of the chip/wafer can be constructed and subjected to analysis, testing, and/or simulation. As well, the three-dimensional model can be optimized and an optimized three-dimensional model can be employed to affect process control in a feedback/forward manner, e. g. , to apply optimizations to the next or the current wafer, respectively. Accordingly, the disclosed mechanisms may be used to optimize semiconductor performance, yield, or for research and development. In addition the three-dimensional model may be used in analysis, simulation, or debugging software.

US Patent:

7875851, Jan 25, 2011

Filed:

May 1, 2006

Appl. No.:

11/381000

Inventors:

Chris Haidinyak - Santa Clara CA, US
Jason P. Cain - Sunnyvale CA, US
Bhanwar Singh - Morgan Hill CA, US

Assignee:

Advanced Micro Devices, Inc. - Sunnyvale CA

International Classification:

G01N 21/88

US Classification:

250311, 250306, 250307, 250310, 2504921, 2504922, 700121, 700122

Abstract:

The claimed subject matter provides a system and/or a method that facilitates utilizing a resolution enhancement for a circuit feature. A scanning electron microscope component () can provide at least one two-dimensional image of the circuit feature. An image analysis engine () can analyze the two-dimensional image. An advanced process control (APC) engine () can generate at least one instruction for at least one of a feed forward control and a feedback control and a process component () can utilize the at least one instruction to minimize an error.

US Patent:

D2631164, Feb 23, 1982

Filed:

Nov 13, 1979

Appl. No.:

6/093262

Inventors:

Jason S. Cain - Walnut Creek CA

International Classification:

D0903

US Classification:

D 9327