Jeffrey E Fish

US Patent:

6901808, Jun 7, 2005

Filed:

Feb 11, 2003

Appl. No.:

10/361860

Inventors:

Leonard J. Sharpless - Fremont CA, US
Neil Benjamin - Palo Alto CA, US
Jeffrey W. Fish - Livermore CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

G01L009/12

US Classification:

73724, 73718

Abstract:

A capacitive manometer includes a flow passage through which gas can enter the manometer, a deflectable diaphragm, and a filter arranged in the flow passage. The filter is capable of removing condensable vapors from the gas so that the condensable vapors do not reach and deposit on the diaphragm. The capacitive manometer can include a cooling unit arranged to cool the filter so as to enhance removal of condensable vapors from the gas by the filter. The capacitive manometer can include a baffle having gas passages distributed to control distribution of condensable vapors, which pass through the baffle, on the diaphragm.