Dr. McCollum graduated from the Indiana University School of Medicine in 1982. He works in New Salisbury, IN and specializes in Family Medicine. Dr. McCollum is affiliated with Harrison County Hospital.
A process for growing field oxide particularly for a dynamic memory is described. The process results in thinner field oxides in the storage array (2000-3000 A) and thicker oxides for the peripheral circuits (7000-8000 A). The thinner field oxide regions have smaller bird-beaks, reducing required substrate area. The plate for the storage nodes are coupled to ground potential, thus the thinner field oxides in the storage region provide sufficient isolation.