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Lisa Gytri - Tigard OR, US Jeff Gordon - West Linn OR, US James Lee - Damascus OR, US Carmen Balderrama - Wilsonville OR, US Joseph Brett Harris - Tualatin OR, US
Assignee:
Novellus Systems, Inc. - Fremont CA
International Classification:
C23C 16/00 C23F 1/00 H01L 21/306
US Classification:
1563455, 118723 VE
Abstract:
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.
Method And Apparatuses For Reducing Porogen Accumulation From A Uv-Cure Chamber
Jeff Gordon - West Linn OR, US James Lee - Damascus OR, US Carmen Balderrama - Watsonville OR, US Joseph Brett Harris - Tualatin OR, US Eugene Smargiassi - Tualatin OR, US Stephen Yu-Hong Lau - Lake Oswego OR, US George D. Kamian - Scotts Valley CA, US Ming Xi - Palo Alto CA, US
International Classification:
B08B 5/02
US Classification:
118642, 134166 R
Abstract:
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.
Method And Apparatuses For Reducing Porogen Accumulation From A Uv-Cure Chamber
- Fremont CA, US Jeff Gordon - West Linn OR, US James Forest Lee - Damascus OR, US Carmen Balderrama - Wilsonville OR, US Joseph Brett Harris - Tualatin OR, US Eugene Smargiassi - Tualatin OR, US Stephen Yu-Hong Lau - Lake Oswego OR, US George D. Kamian - Scotts Valley CA, US Ming Xi - Palo Alto CA, US
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.
Method And Apparatuses For Reducing Porogen Accumulation From A Uv-Cure Chamber
- Fremont CA, US Jeff Gordon - West Linn OR, US James Lee - Damascus OR, US Carmen Balderrama - Wilsonville OR, US Joseph Brett Harris - Tualatin OR, US Eugene Smargiassi - Tualatin OR, US Stephen Yu-Hong Lau - Lake Oswego OR, US George D. Kamian - Scotts Valley CA, US Ming Xi - Palo Alto CA, US
International Classification:
H01L 21/223 B08B 7/00 H01L 21/26 B08B 5/02
Abstract:
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.
Dr. Harris graduated from the Indiana University School of Medicine in 1981. He works in Richmond, VA and specializes in Neurology. Dr. Harris is affiliated with Chippenham Hospital, Henrico Doctors Hospital and Johnston-Willis Hospital.
The serious nature of the complaint necessitated prompt action, the department said in a statement Friday. Following an internal review of the incident, it was determined that the officer involved, Joseph Harris, should be terminated effective immediately.
Date: Aug 13, 2024
Category: U.S.
Source: Google
Arkansas officer fired after being caught on video beating inmate in back of patrol car
Jonesboro Police Chief Rick Elliott fired Officer Joseph Harris on Friday, the day after Harris was caught on his patrol car video punching, elbowing and slamming the car door on an inmate being transferred from a local hospital back to the county jail.
Date: Aug 12, 2024
Category: U.S.
Source: Google
Juneteenth celebration comes early for San Antonio
Now that we have a new president in office, it seems like everybody's trying to be racially divided. For the most part, this is going to bring everybody together. This is not a black or a white thing, it's a people thing. It's about people's rights,"Joseph Harris said.
Date: Jun 17, 2017
Category: U.S.
Source: Google
SRC votes to hand three Philadelphia district schools to charter operators
Joseph Harris, a junior, said he was a 'C' student before enrolling at Universal Audenreid as a sophomore. His grade point average has since risen to 3.3 and he has made the honor roll each marking period.
Date: Apr 28, 2016
Category: U.S.
Source: Google
How Wall Street enabled Detroit's collapse: book excerpt
t andrequire us to pay $400 million, were just going to have to ask thegovernment to allow us to go bankrupt. The city coulddeclare bankruptcy and they would get maybe pennies on the dollar, said Joseph Harris, who served as chief financial officer under interim Mayor Ken Cockrel Jr. in 2009.
The new addition, who's due date was originally in April, is the couple's first daughter together. She joins big brothers Clifford "King" Joseph Harris III, 11, and Major Philant Harris, 7. T.I. has two sons, Messiah Ya'Majesty Harris and Domani Uriah Harris, and a daughter, Deyjah Imani Harris, and
T.I., real name Clifford Joseph Harris Jr., while seemingly on his way to Atlanta to meet with his family, posted on Facebook Saturday how frustrated he was that news of the child's birth had already leaked out.
I. and Tinyare also parents toClifford "King" Joseph Harris III, 11, and Major Philant Harris, 7.T.I. has two older sons, Messiah Ya'Majesty Harris, 16, and Domani Uriah Harris, 15, and a 14-year-old daughter named Deyjah Imani Harris from previous relationships.Tiny also has a 20-year-old daugh
Date: Mar 27, 2016
Category: Entertainment
Source: Google
Youtube
Pastor/Supt Joseph Harris "Lord I Want to Kn...
"My cover for public domain video" COGIC Pastor/Supt. Joseph Harris si...
Duration:
7m 46s
Sam Harris & Joseph Goldstein - The Path and ...
Sam Harris & Joseph Goldstein - The Path and the Goal - Buddhism, Medi...
Duration:
7h 11m 39s
Kingdom Family Talks Podcast # 1 - Joseph Har...
Welcome to Kingdom Family Talks Podcast, episode 1 with celebrity chef...