Joseph Mitchell Szettella - San Antonio TX Jeffery Ozee - San Antonio TX Augusto James Gonzales - San Antonio TX
Assignee:
Sony Electronics, Inc - Park Ridge NJ Sony Corporation
International Classification:
B23Q 300
US Classification:
29464, 29465, 2952511
Abstract:
A mounting method for mounting an electrode assembly on a plasma etching apparatus includes inserting alignment pins in apertures of the plasma etching apparatus. Apertures of the electrode assembly are aligned relative to the alignment pins. The electrode assembly is then mounted on the plasma etching apparatus, passing the alignment pins through the apertures of the electrode assembly. Each alignment pin is then replaced with a locking arrangement.
Joseph Mitchell Szettella - San Antonio TX Jeffrey Eugene Ozee - San Antonio TX Augusto James Gonzales - San Antonio TX Bryan Cary Tucker - San Antonio TX
Assignee:
Sony Corporation - Tokyo Sony Electronics, Inc. - Park Ridge NJ
International Classification:
H01L 2100
US Classification:
438745
Abstract:
A ring prevents particulate build-up in a chemical spraying chamber, and includes a top portion that has a rim, and rests on a base flange of the spraying chamber, and a bottom portion that has a vertical segment that extends below a bottom surface of the base flange.