Kenneth L Gross

US Patent:

6590572, Jul 8, 2003

Filed:

Mar 1, 2000

Appl. No.:

09/516334

Inventors:

Bradley W. Hoffert - Sunnyvale CA
Shawn F. Storm - Menlo Park CA
Abraham E. Rindal - Dunedin FL
Kenneth A. Gross - Los Altos CA
Robert Stano - Sunnyvale CA

Assignee:

Sun Microsystems, Inc. - Mountain View CA

International Classification:

G09G 500

US Classification:

345213, 345 10, 345 14

Abstract:

A monitor interface cable for transmitting display data and command data between a computer system and a display monitor preferably including a microcontroller. The monitor interface cable enables both display and command data to be transmitted simultaneously from the computer system to the display monitor.

US Patent:

6606153, Aug 12, 2003

Filed:

Jul 10, 2001

Appl. No.:

09/901998

Inventors:

Norbert Marxer - Schaanwald, LI
Kenneth P. Gross - San Carlos CA
Hubert Altendorfer - Redwood Shores CA
George Kren - Los Altos CA

Assignee:

Kla-Tencor Corporation - San Jose CA

International Classification:

G01N 2188

US Classification:

3562373

Abstract:

A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.

US Patent:

6692129, Feb 17, 2004

Filed:

Sep 5, 2002

Appl. No.:

10/237239

Inventors:

Kenneth P. Gross - San Carlos CA
Paul Manhart - Tucson AZ
Richard A. Buchroeder - Tucson AZ

Assignee:

Silicon Light Machines - Sunnyvale CA

International Classification:

G03B 2100

US Classification:

353 31, 353 20, 353 84, 353 98, 353122, 348762, 348767, 348795, 359 28, 359259, 359316, 359588, 359590, 356129, 356518

Abstract:

The optical system includes a plurality of light modulators, one or more combining filters, and an optical relay system including a filter. Each light modulator modulates a corresponding incident light beam. The one or more combining filters superimpose the modulated light beams from each of the plurality of light modulators. The optical relay system filters the superimposed light and relays the filtered light to an image plane.

US Patent:

6721052, Apr 13, 2004

Filed:

Dec 20, 2000

Appl. No.:

09/742029

Inventors:

Guoheng Zhao - Milpitas CA
Kenneth P. Gross - San Carlos CA
Rodney Smedt - Los Gatos CA
Mehrdad Nikoonahad - Menlo Park CA

Assignee:

KLA-Technologies Corporation - Milpitas CA

International Classification:

G01B 1104

US Classification:

356369, 356636

Abstract:

A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a polychromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals. At least one of the orientations of the plane of polarization is substantially stationary when the detection takes place.

US Patent:

7085681, Aug 1, 2006

Filed:

Dec 22, 2004

Appl. No.:

11/021145

Inventors:

Emrys J. Williams - Palo Alto CA, US
Kenneth C. Gross - San Diego CA, US

Assignee:

SUN Microsystems, Inc. - Santa Clara CA

International Classification:

G06F 11/30
G06F 15/00
G21C 17/00

US Classification:

702183

Abstract:

One embodiment of the present invention provides a system that monitors a computer system using a plurality of physical sensors. The system operates by polling the plurality of physical sensors in a given sequence at a given rate, wherein each physical sensor monitors a specific physical parameter of the computer system. The system then provides a plurality of measurements from the plurality of physical sensors to a monitoring system. If a given physical sensor detects a parameter that is not within a pre-determined operating range, the system receives an interrupt from the given physical sensor. In response to receiving this interrupt, the system raises an alarm.

US Patent:

7102744, Sep 5, 2006

Filed:

Jul 10, 2003

Appl. No.:

10/619109

Inventors:

Norbert Marxer - Schaanwald, LI
Kenneth P. Gross - San Carlos CA, US
Hubert Altendorfer - Redwood Shores CA, US
George Kren - Los Altos CA, US

Assignee:

KLA-Tencor Corporation - San Jose CA

International Classification:

G01N 21/88

US Classification:

3562373

Abstract:

A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.

US Patent:

7243265, Jul 10, 2007

Filed:

Oct 22, 2003

Appl. No.:

10/690917

Inventors:

Michael J. Wookey - Los Gatos CA, US
Kenneth C. Gross - San Diego CA, US

Assignee:

Sun Microsystems, Inc. - Palo Alto CA

International Classification:

G06F 11/00

US Classification:

714 37, 714 48

Abstract:

Methods, systems, and articles of manufacture consistent with the present invention train a real-time health-monitor for a computer-based system while simultaneously monitoring the health of the system. A plurality of signals that each describe an operating condition of a subject data processing system are monitored in real-time. It is determined whether there is a problem with the subject data processing system by comparing at least one of the monitored signals to a corresponding at least one signal in a known signal dataset. The known signal dataset includes a signal value for at least one signal that describes an operating condition of one of a plurality of subject data processing systems. A new signal dataset having an entry for each monitored signal and a corresponding signal value is prepared simultaneously with monitoring the plurality of signals and determining whether there is a problem.

US Patent:

7277172, Oct 2, 2007

Filed:

Jan 4, 2006

Appl. No.:

11/325872

Inventors:

Daniel Kandel - Aseret, IL
Kenneth P. Gross - San Carlos CA, US
Michael Friedmann - Mountain View CA, US
Jiyou Fu - Sunnyvale CA, US
Shakar Krishnan - Santa Clara CA, US
Boris Golovanevsky - Haifa, IL

Assignee:

KLA-Tencor Technologies, Corporation - Milpitas CA

International Classification:

G01J 4/00
G01N 21/86

US Classification:

356369, 25055909

Abstract:

Systems and methods are disclosed for using ellipsometer configurations to measure the partial Mueller matrix and the complete Jones matrix of a system that may be isotropic or anisotropic. In one embodiment two or more signals, which do not necessarily satisfy any symmetry assumptions individually, are combined into a composite signal which satisfies a symmetry assumption. The individual signals are collected at two or more analyzer angles. Symmetry properties of the composite signals allow easy extraction of overlay information for any relative orientation of the incident light beam with respect to a 1D grating target, as well as for targets comprising general 2D gratings. Signals of a certain symmetry property also allow measurement of profile asymmetry in a very efficient manner. In another embodiment a measurement methodology is defined to measure only signals which satisfy a symmetry assumption. An optional embodiment comprises a single polarization element serving as polarizer and analyzer.