Li Fan

US Patent:

6498870, Dec 24, 2002

Filed:

Apr 20, 1998

Appl. No.:

09/063644

Inventors:

Ming Wu - Pacific Palisades CA
Li Fan - San Diego CA
Anis Husain - San Diego CA

Assignee:

OMM, Inc. - San Diego CA

International Classification:

G02B 626

US Classification:

385 18, 385 16, 385 25

Abstract:

A micromachined plate called a torsion plate, selectively pivots upon a substrate responsively to electrical force so as to move an attached micromirror in a same plane; thereby to accurately selectively intercept, and to reflect, a light beam that is moving parallel to the substrate; forming thus an optomechanical switch The electrical force may be electromagnetic in nature or, preferably, electrostatic. In various embodiments the pivoting torsion plate with the micromirror affixed may be (i) biased off the substrate by a three-dimensional structure and/or by a âreshapedâ torsion beam (ii) bent as plate and operated push OR pull, push AND pull, or push AND push, in a rocking operation, (iii) elevated above the substrate upon a self-assembling âmicro-elevator structureâ and/or (iv) moved greatly in angular position by action of a âmicro-flapâ A new design spring-loaded landing electrode and a torsion microhinge - further enhance performance. The micromachined, or Micro Electro Mechanical Systems (MEMS), optomechanical switch so formed is both fast and accurate to switch light over large angles up to 180Â while being highly resistant to sticking, or âstictionâ.

US Patent:

6526198, Feb 25, 2003

Filed:

Jan 17, 2002

Appl. No.:

10/053399

Inventors:

Ming C. Wu - Pacific Palisades CA
Li Fan - Rowland Heights CA
Anis Husain - San Diego CA

Assignee:

OMM, Inc. - San Diego CA

International Classification:

G02B 626

US Classification:

385 18, 385 16, 385 25

Abstract:

In at least one embodiment, a MEMS optomechanical switch in accordance with the present invention includes a substrate, a signal source capable of transmitting a radiation signal, an electrode coupled to the substrate, and a micromachined plate rotatably coupled to the substrate about a pivot axis. The switch further includes a micromirror having an orientated reflective surface, mounted to the micromachined plate and an electrical source coupled to at least one of the electrode and the micromachined plate.