Linh Dang - Lawndale CA, US Wayne Yoshida - Hermosa Beach CA, US Xiaobing Mei - Manhattan Beach CA, US Jennifer Wang - Redondo Beach CA, US Po-Hsin Liu - Anaheim CA, US Jane Lee - Torrance CA, US Weidong Liu - San Marino CA, US Michael Barsky - Sherman Oaks CA, US Richard Lai - Redondo Beach CA, US
Assignee:
Northrop Grumman Space & Mission Systems Corp. - Los Angeles CA
International Classification:
H01L 29/778
US Classification:
257194, 257E29246
Abstract:
In a method of forming a semiconductor device on a semiconductor substrate (), a photoresist layer () is deposited on the semiconductor substrate; a window () is formed in the photoresist layer () by electron beam lithography; a conformal layer () is deposited on the photoresist layer () and in the window (); and substantially all of the conformal layer () is selectively removed from the photoresist layer () and a bottom portion of the window to form dielectric sidewalls () in the window ().
High Electron Mobility Transistor Semiconductor Device And Fabrication Method Thereof
Linh Dang - Lawndale CA, US Wayne Yoshida - Hermosa Beach CA, US Xiaobing Mei - Manhattan Beach CA, US Jennifer Wang - Redondo Beach CA, US Po-Hsin Liu - Anaheim CA, US Jane Lee - Torrance CA, US Weidong Liu - San Marino CA, US Michael Barsky - Sherman Oaks CA, US Richard Lai - Redondo Beach CA, US
Assignee:
Northrop Grumman Corporation - Los Angeles CA
International Classification:
H01L 29/778 H01L 21/28
US Classification:
257194, 438579, 257E29246, 257E21158
Abstract:
In a method of forming a semiconductor device on a semiconductor substrate (), a photoresist layer () is deposited on the semiconductor substrate; a window () is formed in the photoresist layer () by electron beam lithography; a conformal layer () is deposited on the photoresist layer () and in the window (); and substantially all of the conformal layer () is selectively removed from the photoresist layer () and a bottom portion of the window to form dielectric sidewalls () in the window ().
Dr. Linh T. Dang graduated from the University of Texas Medical School at San Antonio in 1994. She works in Conroe, TX and specializes in Neurology. She speaks English and Vietnamese.
Pathadvantage 5327 N Central Expy STE 300, Dallas, TX 75205 2142195880 (phone), 2142195881 (fax)
Education:
Medical School University of Missouri, Kansas City School of Medicine Graduated: 2006
Languages:
English Spanish
Description:
Dr. Dang graduated from the University of Missouri, Kansas City School of Medicine in 2006. She works in Dallas, TX and specializes in Anatomic Pathology & Clinical Pathology. Dr. Dang is affiliated with Baylor All Saints Medical Center and Texas Health Presbyterian Hospital Dallas.
Murchison Elementary School Los Angeles CA 1986-1992, El Sereno Junior High School Los Angeles CA 1992-1994, El Sereno Middle School Los Angeles CA 1992-1994