Mark E Erickson

US Patent:

6452291, Sep 17, 2002

Filed:

Jul 1, 1999

Appl. No.:

09/348883

Inventors:

Mark Erickson - Sunnyvale CA
Thorkell Gudmundsson - San Jose CA
Pradeep Pandey - San Jose CA

Assignee:

Voyan Technology - Santa Clara CA

International Classification:

F02D 3100

US Classification:

307131, 703 94, 180170

Abstract:

The present invention includes a method and system for reducing switching transients via large signal/small signal thresholding. The present invention prevents a switch from occurring if when the system (i. e. , the system under control) is in small signal mode and permits switches to occur when the system is in large signal mode. Large signal and small signal modes are determined by comparing the difference between the most current value of a comparator variable and the final setpoint with a threshold distance. The system is in small signal mode if the most current value of the comparator variable less the final setpoint value is less than the threshold distance. Otherwise, the system is in large signal mode.

US Patent:

6684114, Jan 27, 2004

Filed:

Mar 3, 2000

Appl. No.:

09/517948

Inventors:

Mark A. Erickson - San Bruno CA
Cecilia Galarza - San Francisco CA
Dan Hernandez - Cupertino CA
Sunil C. Shah - Los Altos CA

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

G05B 1302

US Classification:

700 45, 360 7704

Abstract:

A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.

US Patent:

6725099, Apr 20, 2004

Filed:

Jun 27, 2001

Appl. No.:

09/894061

Inventors:

Mark Erickson - Sunnyvale CA
Thorkell Gudmundsson - San Jose CA
Sunil C. Shah - Los Altos CA

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

G05B 1302

US Classification:

700 33, 700 44, 700 45, 700121, 700300, 118725, 219391, 392416, 392418, 432 36, 438 5, 438 14

Abstract:

The present invention includes a method and system for limiting the ramp rate of a variable under control in order to control stress in a process or plant under control. The present invention takes a limit curve provided by the user and combines that limit curve with a scale factor curve obtained from a model of the system to produce an allowable limit curve. A ramp rate limiter then uses the allowable limit curve to control the ramp rate of the variable under control such that the ramp rate of the variable under control is able to achieve the maximum allowable limit but no more.

US Patent:

6741414, May 25, 2004

Filed:

Jun 15, 2000

Appl. No.:

09/595455

Inventors:

Stephen Boyd - Stanford CA
Sunil C. Shah - Los Altos CA
Mark Erickson - San Bruno CA
Ioannis Kanellakopoulos - Cupertino CA

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

G11B 1546

US Classification:

360 7303

Abstract:

A method and system for joint spindle speed and head position control in rotating media storage systems are described. A controller changes the rotation speed of a spindle assembly based upon the position information of a desired data sector. This controller may also control the actuator assembly based upon the position information of the desired data sector.

US Patent:

6803548, Oct 12, 2004

Filed:

Sep 13, 2001

Appl. No.:

09/950876

Inventors:

Wenling Wang - Tokyo-To, JP
Koichi Sakamoto - Tokyo-To, JP
Fujio Suzuki - Tokyo-To, JP
Moyuru Yasuhara - Tokyo-To, JP
Sunil Shah - Los Altos CA
Pradeep Pandey - San Jose CA
Mark Erickson - Sacramento CA

Assignee:

Tokyo Electron Limited - Tokyo-To

International Classification:

H05B 102

US Classification:

219494, 219497

Abstract:

A heat treatment apparatus for making a heat treatment while estimating temperatures of objects-to-be-processed that can estimate correct temperatures of the objects-to-be-processed. A reaction tube includes heaters and temperature sensors, and receives a wafer boat. A controller estimates temperatures of wafers and temperatures of the temperature sensors in zones in the reaction tube corresponding to the heaters by using the temperature sensors and electric powers of the heaters. Based on relationships between estimated temperatures of the temperature sensors and really metered temperatures, functions expressing the relationships between the estimated temperatures and the really metered temperatures are given for the respective zones. The functions are substituted by the estimated wafer temperatures to correct the estimated wafer temperatures. Electric powers to be fed to the respective heaters are respectively controlled so that the corrected wafer temperatures are converged to target temperature trajectories.

US Patent:

6922596, Jul 26, 2005

Filed:

Aug 7, 2003

Appl. No.:

10/638244

Inventors:

Mark A. Erickson - San Bruno CA, US
Cecilia Galarza - San Francisco CA, US
Dan Hernandez - Cupertino CA, US
Sunil C. Shah - Los Altos CA, US

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

G05B013/02

US Classification:

700 54, 700 28, 700 32, 360 75, 360 7704, 360 7804

Abstract:

A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.

US Patent:

6947876, Sep 20, 2005

Filed:

Mar 10, 2000

Appl. No.:

09/523065

Inventors:

Cecilia Galarza - San Francisco CA, US
Dan Hernandez - San Jose CA, US
Mark Erickson - San Bruno CA, US

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

G06F017/10
G06F007/48
G05B013/02

US Classification:

703 2, 703 6, 700 30, 700 33, 700 29, 700 28, 700 44, 700 45

Abstract:

A method for automated system identification of a linear system is disclosed. A model structure is selected and one or more reference signal values are generated for input into the system. Input signal values and output signal values are retrieved from the system and system identification is performed on the model structure using the input signal values, the output signal values, and the one or more reference signal values. A point model, obtained as a result of the system identification, is then verified for accuracy.

US Patent:

6970415, Nov 29, 2005

Filed:

Nov 10, 2000

Appl. No.:

09/710718

Inventors:

Cecilia Gabriela Galarza - San Francisco CA, US
Michail Tsatsanis - Santa Clara CA, US
Mark Alan Erickson - San Bruno CA, US
Ioannis Kanellakopoulos - Cupertino CA, US
James W. Waite - Los Gatos CA, US
Ming Gu - San Jose CA, US
Sunil C. Shah - Los Altos CA, US
Daniel Joseph Hernandez - San Jose CA, US
Norman Man Leung Yuen - Cupertino CA, US

Assignee:

Tokyo Electron Limited - Tokyo

International Classification:

H04J001/12

US Classification:

370201, 375225, 375254, 375285, 375346

Abstract:

A method and apparatus for identification of interference sources are disclosed.