Mark K Miles

US Patent:

7672035, Mar 2, 2010

Filed:

Dec 1, 2008

Appl. No.:

12/325964

Inventors:

Jeffrey B. Sampsell - Pueblo West CO, US
Mark W. Miles - Atlanta GA, US
Clarence Chui - San Jose CA, US
Manish Kothari - Cupertino CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359291, 359290

Abstract:

A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

US Patent:

7791787, Sep 7, 2010

Filed:

Jan 30, 2009

Appl. No.:

12/363671

Inventors:

Mark W. Miles - Atlanta GA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359290, 359291

Abstract:

A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.

US Patent:

7830588, Nov 9, 2010

Filed:

Feb 9, 2009

Appl. No.:

12/368136

Inventors:

Mark W. Miles - Atlanta GA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359291, 359290, 359223, 359224

Abstract:

An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

US Patent:

7852544, Dec 14, 2010

Filed:

Mar 1, 2010

Appl. No.:

12/715220

Inventors:

Jeffrey Brian Sampsell - Pueblo West CO, US
Mark W. Miles - Atlanta GA, US
Clarence Chui - San Jose CA, US
Manish Kothari - Cupertino CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359290, 359291

Abstract:

A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

US Patent:

7875485, Jan 25, 2011

Filed:

Jul 27, 2009

Appl. No.:

12/510046

Inventors:

Teruo Sasagawa - Los Gatos CA, US
SuryaPrakash Ganti - Los Altos CA, US
Mark W. Miles - Atlanta GA, US
Clarence Chui - San Jose CA, US
Manish Kothari - Cupertino CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

H01L 21/00

US Classification:

438 53, 438 48, 438 50, 438 52

Abstract:

Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

US Patent:

RE42119, Feb 8, 2011

Filed:

Jun 2, 2005

Appl. No.:

11/144210

Inventors:

Clarence Chui - San Jose CA, US
Mark W. Miles - Atlanta GA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00
G02F 1/07

US Classification:

359291, 359247

Abstract:

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.

US Patent:

7929197, Apr 19, 2011

Filed:

Jun 10, 2010

Appl. No.:

12/813286

Inventors:

Mark W. Miles - Atlanta GA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359291, 359290

Abstract:

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

US Patent:

8023191, Sep 20, 2011

Filed:

May 7, 2008

Appl. No.:

12/116791

Inventors:

Mark W. Miles - Atlanta GA, US
Brian W. Arbuckle - Danville CA, US
Ion Bita - San Jose CA, US
Manish Kothari - Cupertino CA, US
Patrick F. Brinkley - San Mateo CA, US
Gang Xu - Cupertino CA, US
Nassim Khonsari - Redwood City CA, US
Jonathan C. Griffiths - Fremont CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 5/28
G03C 5/00

US Classification:

359580, 359589, 359900, 347 2, 427466, 430 7, 430321

Abstract:

Methods of fabricating a static interferometric image device and static interferometric image device formed by the same are disclosed. In one embodiment, a method includes providing a substrate. A plurality of liquid layers are formed over the substrate by an inkjet process such that the layers are lateral to one another. The liquid layers contain a solidifiable material or particles. Then, the plurality of liquid layers are solidified to form a plurality of solid layers. In some embodiments, the substrate includes pre-defined cavities, and the liquid layers are formed in the cavities. In other embodiments, the substrate includes a substantially planar, stepped, or continuously transitioning surface, and the liquid layers are formed on the surface. The inkjet process provides optical fillers or spacers for defining interferometric gaps between absorbers and reflectors in the display device, based at least partially on an image that the display device is designed to display.