Peter G Gruber

US Patent:

6534863, Mar 18, 2003

Filed:

Feb 9, 2001

Appl. No.:

09/781121

Inventors:

George F. Walker - New York NY
Ronald D. Goldblatt - Yorktown Heights NY
Peter A. Gruber - Mohegan Lake NY
Raymond R. Horton - Dover Plains NY
Kevin S. Petrarca - Newburgh NY
Richard P. Volant - New Fairfield CT
Tien-Jen Cheng - Bedford NY

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 2348

US Classification:

257737, 257751, 257761, 257762, 257766, 257769, 257781, 257784

Abstract:

A process is described for forming a common input-output (I/O) site that is suitable for both wire-bond and solder bump flip chip connections, such as controlled-collapse chip connections (C4). The present invention is particularly suited to semiconductor chips that use copper as the interconnection material, in which the soft dielectrics used in manufacturing such chips are susceptible to damage due to bonding forces. The present invention reduces the risk of damage by providing site having a noble metal on the top surface of the pad, while providing a diffusion barrier to maintain the high conductivity of the metal interconnects. Process steps for forming an I/O site within a substrate are reduced by providing a method for selectively depositing metal layers in a feature formed in the substrate. Since the I/O sites of the present invention may be used for either wire-bond or solder bump connections, this provides increased flexibility for chip interconnection options, while also reducing process costs.

US Patent:

7497366, Mar 3, 2009

Filed:

Jun 6, 2007

Appl. No.:

11/758752

Inventors:

S. Jay Chey - Ossining NY, US
Steven A. Cordes - Yorktown Heights NY, US
Peter A. Gruber - Mohegan Lake NY, US
John U. Knickerbocker - Monroe NY, US
James L. Speidell - Poughquag NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

B23K 31/02

US Classification:

228256, 228200

Abstract:

A system and method are provided for injection molding conductive bonding material into a plurality of cavities in a mold within a vacuum chamber. A mold and a fill head are located within a vacuum chamber, wherein the mold includes a plurality of cavities. A vacuum is created within the vacuum chamber, thereby removing air from the chamber and from the cavities. Optionally, rotational motion is provided to at least one of the mold and the fill head while the fill head is in substantial contact with the mold. Conductive bonding material is forced out of the fill head toward the mold, and into at least one of the cavities, while a vacuum is maintained in the vacuum chamber.

US Patent:

8148255, Apr 3, 2012

Filed:

Sep 18, 2007

Appl. No.:

11/856831

Inventors:

Bing Dang - Chappaqua NY, US
Peter A. Gruber - Mohegan Lake NY, US
Luc Guerin - Quebec, CA
Chirag S. Patel - Peerkskill NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 21/44

US Classification:

438613, 438106, 438615, 438616, 257E21575, 257E2301

Abstract:

Interconnects are formed on attachment points of a wafer by performing several steps. A plurality of cavities having a predetermined shape is formed in a semiconductor substrate. These cavities are then filled with an interconnect material to form the interconnects. The interconnects are subsequently attached to the attachment points of the wafer.

US Patent:

8268719, Sep 18, 2012

Filed:

Jan 1, 2011

Appl. No.:

12/983292

Inventors:

Stephen L. Buchwalter - Armonk NY, US
Peter A. Gruber - Armonk NY, US
Jae-Woong Nah - Armonk NY, US
Da-Yuan Shih - Poughkeepsie NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 21/44

US Classification:

438616, 257E21506, 29843, 22818022

Abstract:

A process for aligning at least two layers in an abutting relationship with each other comprises forming a plurality of sprocket openings in each of the layers for receiving a sprocket of diminishing diameters as the sprocket extends outwardly from a base, with the center axes of the sprocket openings in each layer being substantially alignable with one another, the diameter of the sprocket openings in an abutting layer for first receiving the sprocket being greater than the diameter of the sprocket openings in an abutted layer. This is followed by forming a plurality of reservoir openings in each of at least two of the layers and positioning the sprocket openings in the layers to correspond with one another and the reservoir openings in the layers to correspond with one another so that substantial alignment of the center axes of the corresponding sprocket openings in the layers effects substantial alignment of the center axes of the corresponding reservoir openings in the layers. Engaging the sprocket openings with the sprocket by inserting the end of the sprocket having the smallest diameter into the sprocket openings having the largest diameter in the layers and continuing through to the sprocket opening having the smallest diameter in the layers effects substantial alignment of the center axes of the corresponding sprocket openings and substantial alignment of the center axes of the corresponding reservoir openings in the layers. The invention also comprises apparatus for performing this process.

US Patent:

8328156, Dec 11, 2012

Filed:

Feb 13, 2012

Appl. No.:

13/371840

Inventors:

Bing Dang - Chappaqua NY, US
Peter A. Gruber - Mohegan Lake NY, US
Luc Guerin - Quebec, CA
Chirag S. Patel - Peekskill NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

B28B 7/22
E04G 11/50

US Classification:

249 60, 249117, 257E21586

Abstract:

Interconnects are formed on attachment points of a wafer by performing several steps. A plurality of cavities having a predetermined shape is formed in a semiconductor substrate. These cavities are then filled with an interconnect material to form the interconnects. The interconnects are subsequently attached to the attachment points of the wafer.

US Patent:

20030092254, May 15, 2003

Filed:

Dec 18, 2002

Appl. No.:

10/322831

Inventors:

George Walker - New York NY, US
Ronald Goldblatt - Yorktown Heights NY, US
Peter Gruber - Mohegan Lake NY, US
Raymond Horton - Dover Plains NY, US
Kevin Petrarca - Newburgh NY, US
Richard Volant - New Fairfield CT, US
Tien-Jen Cheng - Bedford NY, US

International Classification:

H01L021/44

US Classification:

438/613000

Abstract:

A process is described for forming a common input-output (I/O) site that is suitable for both wire-bond and solder bump flip chip connections, such as controlled-collapse chip connections (C4). The present invention is particularly suited to semiconductor chips that use copper as the interconnection material, in which the soft dielectrics used in manufacturing such chips are susceptible to damage due to bonding forces. The present invention reduces the risk of damage by providing site having a noble metal on the top surface of the pad, while providing a diffusion barrier to maintain the high conductivity of the metal interconnects. Process steps for forming an I/O site within a substrate are reduced by providing a method for selectively depositing metal layers in a feature formed in the substrate. Since the I/O sites of the present invention may be used for either wire-bond or solder bump connections, this provides increased flexibility for chip interconnection options, while also reducing process costs.

US Patent:

20080014406, Jan 17, 2008

Filed:

Jul 11, 2006

Appl. No.:

11/484124

Inventors:

S. Jay Chey - Ossining NY, US
Peter A. Gruber - Mohegan Lake NY, US

International Classification:

C23C 16/00
B32B 3/10

US Classification:

428131, 4272497

Abstract:

An injection molded soldering head includes a substrate that is flexible (compliant) and stable at high temperature. The substrate includes an aperture therethrough for holding and dispensing solder onto a mold and a low friction coating on the bottom side of the substrate to provide a lower friction surface for the head.

US Patent:

20090001248, Jan 1, 2009

Filed:

Aug 23, 2007

Appl. No.:

11/844070

Inventors:

Matthew J. Farinelli - Bronx NY, US
Steven Cordes - Yorktown Heights NY, US
Donna S. Nielsen - Yorktown Heights NY, US
Samuel Roy McKnight - New Paltz NY, US
Jay S. Chey - Ossining NY, US
Peter A. Gruber - Mohegan Lake NY, US
Joanna Rosner - Cortland Manor NY, US

International Classification:

B22C 9/00

US Classification:

249119

Abstract:

A solder mold includes a substrate and a plurality of cavities for holding solder to be transferred to an integrated circuit. The plurality of cavities comprises cavities of at least two different volumes.