- Santa Clara CA, US Joseph Yudovsky - Campbell CA, US Garry K. Kwong - San Jose CA, US Tai T. Ngo - Dublin CA, US Kevin Griffin - Livermore CA, US Kenneth S. Collins - San Jose CA, US Ren Liu - Sunnyvale CA, US
International Classification:
H01J 37/32
Abstract:
A modular plasma source assembly for use with a processing chamber is described. The assembly includes an RF hot electrode with an end dielectric and a sliding ground connection positioned adjacent the sides of the electrode. A seal foil connects the sliding ground connection to the housing to provide a grounded sliding ground connection separated from the hot electrode by the end dielectric. A coaxial feed line passes through a conduit into the RF hot electrode isolated from the processing environment so that the coaxial RF feed line is at atmospheric pressure while the plasma processing region is at reduced pressure.
Elongated Capacitively Coupled Plasma Source For High Temperature Low Pressure Environments
John C. Forster - Mountain View CA, US Joseph Yudovsky - Campbell CA, US Garry K. Kwong - San Jose CA, US Tai T. Ngo - Dublin CA, US Kevin Griffin - Livermore CA, US Kenneth S. Collins - San Jose CA, US Ren Liu - Sunnyvale CA, US
International Classification:
H01J 37/32
US Classification:
31511121
Abstract:
A modular plasma source assembly for use with a processing chamber is described. The assembly includes an RF hot electrode with an end dielectric and a sliding ground connection positioned adjacent the sides of the electrode. A seal foil connects the sliding ground connection to the housing to provide a grounded sliding ground connection separated from the hot electrode by the end dielectric. A coaxial feed line passes through a conduit into the RF hot electrode isolated from the processing environment so that the coaxial RF feed line is at atmospheric pressure while the plasma processing region is at reduced pressure.
Name / Title
Company / Classification
Phones & Addresses
Ren Zhen Liu
JIN JIN BUFFET INC
Ren Liu President
BAJA SPORTS INTERNATIONAL, INC Business Services at Non-Commercial Site · Nonclassifiable Establishments
Verizon
Lead Software Developer
General Motors
Java Development Lead
Cox Communications Mar 2006 - Aug 2014
Senior Software Engineer
Intercall Feb 2005 - Mar 2006
Software Engineer
Delta Air Lines 1999 - 2005
Software Developer
Education:
University of Arkansas
Master of Science, Masters, Electrical Engineering
Skills:
Agile Methodologies Machine Learning Web Services Restful Architecture Java Java Enterprise Edition Python Php Objective C Xml Software Development Sql Javascript Jdbc Css Angularjs Soap Amazon Web Services Jboss Application Server C++ C Software Engineering Ios Development Html 5 Jquery Jquery Ui Restful Webservices Sun Certified Java Programmer Apache Ios Android Development Team Management Scrum Software Development Life Cycle Requirements Analysis Unix Databases Project Management Management Linux Agile Application Development Spring Framework Devops Linux System Administration Entrepreneurship Mysql Oracle Database Clou Artificial Neural Networks Data Analysis