Song H Park

US Patent:

8527080, Sep 3, 2013

Filed:

Oct 2, 2008

Appl. No.:

12/244735

Inventors:

Shay Assaf - Cupertino CA, US
Venkatesh Babu - San Jose CA, US
Robert D. Flores - Campbell CA, US
Brendan Hickey - San Francisco CA, US
Krishna Kuttannair - San Jose CA, US
Song J. Park - Pleasanton CA, US
Adrian Rhee - Santa Clara CA, US
Chongyang Chris Wang - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700101, 700121, 718104

Abstract:

A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.

Address:

2111 Morning Brk Cir, Lawrenceville, GA 30043

VIN:

5NPET46C48H299514

Make:

HYUNDAI

Model:

SONATA

Year:

2008