Susan W Hunt

US Patent:

41781139, Dec 11, 1979

Filed:

Dec 5, 1977

Appl. No.:

5/857427

Inventors:

Robert I. Beaver - Menlo Park CA
Michael J. Adams - San Jose CA
George L. Prodanovich - Campbell CA
Paul F. Key - San Martin CA
Don O. Rawlings - San Jose CA
P. Santhanam - Sunnyvale CA
Susan L. Hunt - Milpitas CA

Assignee:

Macronetics, Inc. - Sunnyvale CA

International Classification:

B65G 5102

US Classification:

406 10

Abstract:

Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.