Tai Trong Ngo

US Patent:

6464795, Oct 15, 2002

Filed:

May 3, 2000

Appl. No.:

09/563573

Inventors:

Semyon Sherstinsky - San Francisco CA
Calvin Augason - Los Altos CA
Leonel A. Zuniga - San Jose CA
Jun Zhao - Cupertino CA
Talex Sajoto - Campbell CA
Leonid Selyutin - San Leandro CA
Joseph Yudovsky - Campbell CA
Maitreyee Mahajani - San Jose CA
Steve G. Ghanayem - Sunnyvale CA
Tai T. Ngo - Dublin CA
Arnold Kholodenko - San Francisco CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G23C 1600

US Classification:

118728, 118715, 118725

Abstract:

A support member for supporting a substrate in a process chamber, the support member having a substrate support surface with one or more isolated recessed areas. A vacuum channel and a gas channel are formed in the support member along a common plane and are coupled to a vacuum source and gas source respectively. The gas channel comprises two or more concentrically disposed annular gas channels encompassing the vacuum channel. The vacuum channel is coupled to the support surface, and in particular to the one or more recessed areas, by a plurality of conduits. A portion of the conduits is disposed diametrically exterior to at least one of the annular gas channels and communicates with the vacuum channel via bypass channels.

US Patent:

7779527, Aug 24, 2010

Filed:

Oct 5, 2008

Appl. No.:

12/245762

Inventors:

Joseph Yudovsky - Campbell CA, US
Tai T Ngo - Dublin CA, US
Leon Volfovski - Mountain View CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B23Q 3/00

US Classification:

29464

Abstract:

In a first aspect, an apparatus is provided for forming a scrubber brush assembly. The apparatus includes a mandrel adapted to be inserted into a scrubber brush so as to form a scrubber brush assembly, the mandrel having: a first end; a second end; and one or more position guides adjacent at least one of the first and second ends and adapted to position a scrubber brush on the mandrel. Numerous other aspects are provided.

US Patent:

8231431, Jul 31, 2012

Filed:

Jan 23, 2009

Appl. No.:

12/358814

Inventors:

Dhruv Gajaria - Sunnyvale CA, US
Zhiyong Li - San Jose CA, US
Gopalakrishna B. Prabhu - San Jose CA, US
Yacov Elgar - Sunnyvale CA, US
John Visitacion - Newark CA, US
Yong Liu - San Jose CA, US
Jeffrey S. Sullivan - Castro Valley CA, US
Salvador Umotoy - Antioch CA, US
Tai T. Ngo - Dublin CA, US
Michael Marriott - Morgan Hill CA, US
Peter Crundwell - Horsham, GB
Vinay Shah - San Mateo CA, US
Ho Gene Choi - Santa Clara CA, US
Dennis C. Pierce - Pleasanton CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B24B 49/00
B24B 7/06
B24B 53/21

US Classification:

451 8, 451 21, 451194, 451213, 451443

Abstract:

The present invention generally relates to an edge deletion module positioned within an automated solar cell fabrication line. The edge deletion module may include a grinding wheel device for removing material from edge regions of a solar cell device and cleaning the edge regions of the solar cell device after removing the material. The edge deletion module may also include an abrasive element, a portion of which is ground as it is periodically, laterally advanced toward the grinding wheel device. A controller is provided for controlling the operation and function of various facets of the module.

US Patent:

20050172438, Aug 11, 2005

Filed:

Jan 28, 2005

Appl. No.:

11/048099

Inventors:

Joseph Yudovsky - Campbell CA, US
Tai Ngo - Dublin CA, US
Leon Volfovski - Mountain View CA, US

International Classification:

A46D001/00
A46B007/10

US Classification:

015179000, 300021000, 015230000

Abstract:

In a first aspect, a method is provided for assembling a scrubber brush assembly. The method includes the steps of (1) inserting one or more inserts into an opening of a scrubber brush, wherein the opening of the scrubber brush is defined by an interior surface of the scrubber brush; (2) inserting a mandrel into the opening of the scrubber brush such that the one or more inserts are between an exterior surface of the mandrel and the interior surface of the scrubber brush; and (3) removing the one or more inserts to allow the exterior surface of the mandrel to contact the interior surface of the scrubber brush, thereby installing the scrubber brush onto the mandrel. Numerous other aspects are provided.

US Patent:

20060240921, Oct 26, 2006

Filed:

Aug 10, 2005

Appl. No.:

11/201402

Inventors:

Joseph Yudovsky - Campbell CA, US
Tai Ngo - Dublin CA, US

International Classification:

F16H 7/08
F16H 7/14

US Classification:

474101000, 474115000

Abstract:

In a first aspect, a method is provided for adjusting tension of a belt of a semiconductor device manufacturing tool. The first method includes (1) coupling an elastic element between a pulley coupled to the belt and a fixed surface of the semiconductor device manufacturing tool; and (2) compressing or decompressing the elastic element so as to adjust at least one of a height and a tilt of the pulley and a tension of the belt coupled to the pulley. Numerous other aspects are provided.

US Patent:

20070084408, Apr 19, 2007

Filed:

May 5, 2006

Appl. No.:

11/381966

Inventors:

Joseph Yudovsky - Campbell CA, US
Tai Ngo - Dublin CA, US
Cesar Tejamo - Stockton CA, US
Maitreyee Mahajani - Saratoga CA, US
Brendan McDougall - Livermore CA, US
Yi-Chiau Huang - Fremont CA, US
Robert Cook - Pleasanton CA, US
Yeong Kim - Pleasanton CA, US
Alexander Tam - Santa Clara CA, US
Adam Brailove - Gloucester MA, US
Steve Ghanayem - Los Altos CA, US

International Classification:

C23C 16/00

US Classification:

118725000

Abstract:

An apparatus for batch processing of a wafer is disclosed. In one embodiment the batch processing apparatus includes a bell jar furnace having a diffuser disposed between gas inlets and the substrate positioned within the furnace to direct flows within the chamber around the perimeter of the substrate.

US Patent:

20090031516, Feb 5, 2009

Filed:

Sep 26, 2008

Appl. No.:

12/239724

Inventors:

Joseph Yudovsky - Campbell CA, US
Tai T. Ngo - Dublin CA, US
Leon Volfovski - Mountain View CA, US

International Classification:

A46B 3/00
A46B 17/02

US Classification:

15179

Abstract:

In a first aspect, an apparatus is provided for forming a scrubber brush assembly. The apparatus includes a mandrel adapted to be inserted into a scrubber brush so as to form a scrubber brush assembly, the mandrel having: a first end; a second end; and one or more position guides adjacent at least one of the first and second ends and adapted to position a scrubber brush on the mandrel. Numerous other aspects are provided.

US Patent:

20100305884, Dec 2, 2010

Filed:

May 17, 2010

Appl. No.:

12/781353

Inventors:

Joseph Yudovsky - Campbell CA, US
Jeffrey Tobin - Mountain View CA, US
Patricia M. Liu - Saratoga CA, US
Faruk Gungor - San Jose CA, US
Tai T. Ngo - Dublin CA, US
Travis Tesch - Santa Clara CA, US
Kenric Choi - Santa Clara CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

G01N 7/00

US Classification:

702 50, 73 3104

Abstract:

Methods of determining an amount of precursor in an ampoule have been provided herein. In some embodiments, a method for determining an amount of solid precursor in an ampoule may include determining a first pressure in an ampoule having a first volume partially filled with a solid precursor; flowing an amount of a first gas into the ampoule to establish a second pressure in the ampoule; determining a remaining portion of the first volume based on a relationship between the first pressure, the second pressure, and the amount of the first gas flowed into the ampoule; and determining the amount of solid precursor in the ampoule based on the first volume and the remaining portion of the first volume.