Yuji Yamaguchi
age ~44
from La Jolla, CA
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Yuji Yamaguchi
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Method And Apparatus For Registration With Integral Alignment Optics
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US Patent:7337552, Mar 4, 2008
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Filed:Aug 24, 2004
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Appl. No.:10/925745
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Inventors:Adlai H. Smith - Escondido CA, US
Bruce B. McArthur - San Diego CA, US
Thomas K. Khuu - San Diego CA, US
Yuji Yamaguchi - San Diego CA, US -
Assignee:Litel Instruments - San Diego CA
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International Classification:G01D 21/00
G03B 27/42 -
US Classification:33645, 33297, 355 53
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Abstract:A method and apparatus for front to back substrate registration is described. Alignment characteristics of features on surfaces of substrates can be used to physically align substrates with a multiplicity of integrated alignment optics. Measurement of offsets of the integral alignment optics are used to compute registration data for use in calibration of the substrate global alignment.
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